公开(公告)号：US06393169B1

公开(公告)日：2002-05-21

申请号：US09226783

申请日：1999-01-06

申请人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R.M. Rao

发明人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R.M. Rao

IPC分类号： G02B612

CPC分类号： G02B6/43 ,  G02B2006/12107 ,  G02B2006/12142 ,  G02F1/218 ,  G02F2001/0152 ,  G02F2201/307

摘要： A method and an apparatus providing an optical interconnection in an integrated circuit die. In one embodiment, an optical interconnection is used to optically interconnect a waveguide-based optical modulator through the insulating layer and back side of the semiconductor substrate of the integrated circuit die. In one embodiment, an insulating oxide layer is disposed between a semiconductor waveguide optical modulator and the back side of the semiconductor substrate. Optical conduits are disposed in the insulating oxide layer at the locations where light enters and exits the semiconductor waveguide optical modulator. In one embodiment, the optical conduits have indexes of refraction substantially equal to the indexes of refraction of the semiconductor substrate and the semiconductor waveguide optical modulator. Thus, attenuation of the light used to optically couple the semiconductor waveguide optical modulator through the back side of the semiconductor substrate is reduced.

摘要翻译： 一种在集成电路管芯中提供光互连的方法和装置。 在一个实施例中，光互连用于通过集成电路管芯的半导体衬底的绝缘层和背面光学地互连基于波导的光学调制器。 在一个实施例中，绝缘氧化物层设置在半导体波导光调制器和半导体衬底的背面之间。 在光入射到半导体波导光调制器的位置处，光导管设置在绝缘氧化物层中。 在一个实施例中，光导管的折射指数基本上等于半导体衬底和半导体波导光调制器的折射率。 因此，减少了通过半导体衬底的背面光耦合半导体波导光学调制器的光的衰减。