Control by sample reflectivity
    3.
    发明授权
    Control by sample reflectivity 有权
    通过样品反射率控制

    公开(公告)号:US07903250B1

    公开(公告)日:2011-03-08

    申请号:US12477571

    申请日:2009-06-03

    CPC classification number: G01N21/55 G01N21/9501

    Abstract: A method of performing an investigation of a substrate, by measuring a reflectivity of the substrate, comparing the reflectivity of the substrate to an anticipated reflectivity value, selectively subjecting the substrate to a laser beam for a predetermined duration and at a predetermined energy only when the reflectivity of the substrate is within a specified tolerance of the anticipated reflectivity value, selectively signaling a fault condition when the reflectivity of the substrate is not within the specified tolerance of the anticipated reflectivity value, and selectively performing the investigation of the substrate only when the reflectivity of the substrate is within the specified tolerance of the anticipated reflectivity value.

    Abstract translation: 通过测量衬底的反射率,将衬底的反射率与预期反射率值进行比较来选择性地对衬底进行预定的时间和激光束的处理的方法,只有当 衬底的反射率在预期反射率值的特定公差内,当衬底的反射率不在预期反射率值的规定公差内时选择性地发信号通知故障状态,并且仅当反射率 的基板在预期反射率值的规定公差内。

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