SILICA GLASS, HIGH FREQUENCY DEVICE USING SILICA GLASS, AND SILICA GLASS PRODUCTION METHOD

    公开(公告)号:US20220411322A1

    公开(公告)日:2022-12-29

    申请号:US17895149

    申请日:2022-08-25

    Applicant: AGC Inc.

    Inventor: Kazuya SASAKI

    Abstract: The present invention relates to a silica glass including bublles in the number of 1×107/cm3 to 1×1015/cm3 and having a density of 0.5 g/cm3 to 1.95 g/cm3. The present invention also relates to a method for producing a silica glass, including: a step of depositing SiO2 fine particles generated by flame hydrolysis of a silicon compound, to obtain a silica glass porous body; a step of heating and sintering the silica glass porous body in an inert gas atmosphere, to obtain a silica glass dense body; and a step of performing a foaming treatment to heat the silica glass dense body under a reduced pressure condition.

    SILICA GLASS POROUS BODY AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:US20240025802A1

    公开(公告)日:2024-01-25

    申请号:US18479859

    申请日:2023-10-03

    Applicant: AGC Inc.

    Inventor: Kazuya SASAKI

    CPC classification number: C03C11/00 C03B19/1453

    Abstract: An object of the present invention is to provide a technique capable of obtaining a shower plate having cleaning resistance without machining. The present invention relates to a silica glass porous body having a plurality of pores, in which the plurality of pores includes a non-communication pore and a communication pore, and the pores have an average pore size, obtained by mercury intrusion porosimetry, of 10 μm to 150 μm.

    SILICA GLASS MEMBER AND METHOD FOR PRODUCING SAME

    公开(公告)号:US20240025795A1

    公开(公告)日:2024-01-25

    申请号:US18479852

    申请日:2023-10-03

    Applicant: AGC Inc.

    Inventor: Kazuya SASAKI

    CPC classification number: C03C3/06 C03B32/00

    Abstract: The present invention relates to a silica glass member having a plurality of pores, in which some or all of the plurality of pores are communication pores, and S/S0 is 1.5 or more. S: surface area obtained by a BET method for a 40 mm×8 mm×0.5 mm sample cut from the silica glass member; and S0: geometric surface area obtained based on external dimensions of the sample.

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