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公开(公告)号:US20220411322A1
公开(公告)日:2022-12-29
申请号:US17895149
申请日:2022-08-25
Applicant: AGC Inc.
Inventor: Kazuya SASAKI
Abstract: The present invention relates to a silica glass including bublles in the number of 1×107/cm3 to 1×1015/cm3 and having a density of 0.5 g/cm3 to 1.95 g/cm3. The present invention also relates to a method for producing a silica glass, including: a step of depositing SiO2 fine particles generated by flame hydrolysis of a silicon compound, to obtain a silica glass porous body; a step of heating and sintering the silica glass porous body in an inert gas atmosphere, to obtain a silica glass dense body; and a step of performing a foaming treatment to heat the silica glass dense body under a reduced pressure condition.
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公开(公告)号:US20240208854A1
公开(公告)日:2024-06-27
申请号:US18424963
申请日:2024-01-29
Applicant: AGC Inc.
Inventor: Tomoki OWADA , Kazuya SASAKI , Masahiro KAWAGISHI , Satoru KURATA
CPC classification number: C03C3/078 , C03C3/06 , C03C2204/00
Abstract: The present invention relates to a TiO2-containing silica glass substrate that: contains 6.7-12 mass % of TiO2, expressed as a mass percentage on an oxide basis; has a CTE-slope of 1.40 ppb/K/K or less; and, in at least one main surface and at least one end surface, (A) no striae are observed in a stria evaluation in compliance with JOGIS 11-2008, or (B) the striation intensity corresponds to class A under US military specification MTL-G-174 B.
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公开(公告)号:US20200255324A1
公开(公告)日:2020-08-13
申请号:US16860107
申请日:2020-04-28
Applicant: AGC Inc.
Inventor: Nobutaka KIDERA , Kazuya SASAKI , Yasutomi IWAHASHI
Abstract: A silica glass for a radio-frequency device has an OH group concentration being less than or equal to 300 wtppm; an FQ value being higher than or equal to 90,000 GHz at a frequency of higher than or equal to 25 GHz and lower than or equal to 30 GHz; and a slope being greater than or equal to 1,000 in a case where the FQ value is approximated as a linear function of the frequency in a frequency band of higher than or equal to 20 GHz and lower than or equal to 100 GHz.
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公开(公告)号:US20240025802A1
公开(公告)日:2024-01-25
申请号:US18479859
申请日:2023-10-03
Applicant: AGC Inc.
Inventor: Kazuya SASAKI
CPC classification number: C03C11/00 , C03B19/1453
Abstract: An object of the present invention is to provide a technique capable of obtaining a shower plate having cleaning resistance without machining. The present invention relates to a silica glass porous body having a plurality of pores, in which the plurality of pores includes a non-communication pore and a communication pore, and the pores have an average pore size, obtained by mercury intrusion porosimetry, of 10 μm to 150 μm.
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公开(公告)号:US20240025795A1
公开(公告)日:2024-01-25
申请号:US18479852
申请日:2023-10-03
Applicant: AGC Inc.
Inventor: Kazuya SASAKI
Abstract: The present invention relates to a silica glass member having a plurality of pores, in which some or all of the plurality of pores are communication pores, and S/S0 is 1.5 or more. S: surface area obtained by a BET method for a 40 mm×8 mm×0.5 mm sample cut from the silica glass member; and S0: geometric surface area obtained based on external dimensions of the sample.
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