公开(公告)号：US20230395398A1

公开(公告)日：2023-12-07

申请号：US18450543

申请日：2023-08-16

Applicant: AGC Inc.

Inventor： Seigo KOTERA ,  Satoshi TAKENAKA ,  Tetsuya HASEGAWA ,  Takatoshi YAOITA ,  Masayuki MORINO ,  Mio TOKUNAGA ,  Yuki HAYASAKA

IPC: H01L21/56 ,  H01L21/306

CPC classification number: H01L21/566 ,  H01L21/306

Abstract: The present invention relates to a film including at least a substrate and an antistatic layer, in which a ratio of a peeled area when a tape peeling test is performed under the following conditions after 300% uniaxial stretching at 25° C. is less than 5%, the tape peeling test is that: Cellotape® is pressure-bonded to a surface of the film on an antistatic layer side using a roller through 5 reciprocations with a load of 4 kg, and the Cellotape® is peeled off at a speed of 100 m/min in a direction of 180° with respect to the film within 5 minutes, thereby obtaining a ratio of a peeled area of the film to an area of an adhesive portion of the Cellotape®.