公开(公告)号：US20230395398A1

公开(公告)日：2023-12-07

申请号：US18450543

申请日：2023-08-16

Applicant: AGC Inc.

Inventor： Seigo KOTERA ,  Satoshi TAKENAKA ,  Tetsuya HASEGAWA ,  Takatoshi YAOITA ,  Masayuki MORINO ,  Mio TOKUNAGA ,  Yuki HAYASAKA

IPC: H01L21/56 ,  H01L21/306

CPC classification number: H01L21/566 ,  H01L21/306

Abstract: The present invention relates to a film including at least a substrate and an antistatic layer, in which a ratio of a peeled area when a tape peeling test is performed under the following conditions after 300% uniaxial stretching at 25° C. is less than 5%, the tape peeling test is that: Cellotape® is pressure-bonded to a surface of the film on an antistatic layer side using a roller through 5 reciprocations with a load of 4 kg, and the Cellotape® is peeled off at a speed of 100 m/min in a direction of 180° with respect to the film within 5 minutes, thereby obtaining a ratio of a peeled area of the film to an area of an adhesive portion of the Cellotape®.

公开(公告)号：US20200376814A1

公开(公告)日：2020-12-03

申请号：US16999263

申请日：2020-08-21

Applicant: AGC Inc.

Inventor： Lilin ZHOU ,  Kumiko SUWA ,  Kenji ISHIZEKI ,  Hideyuki HIRAKOSO ,  Daisuke KOBAYASHI ,  Michinori SUEHARA ,  Mio TOKUNAGA

IPC: B32B17/10 ,  B32B27/28 ,  C08L71/02 ,  C08K5/5419 ,  B32B9/00 ,  G06F3/00 ,  B05D5/08 ,  C03C17/42

Abstract: A water/oil repellent layer-provided article, containing a substrate, a water/oil repellent layer containing a hydrolyzed condensate of a fluorinated compound having a hydrolyzable silyl group, and a silicon oxide layer containing alkali metal atoms, present between the substrate and the water/oil repellent layer, where in the silicon oxide layer, the average concentration of the alkali metal atoms in a region with a depth from the surface in contact with the water/oil repellent layer of at least 0.1 nm and at most 0.3 nm, is at least 2.0×1019 atoms/cm3.