BOLOMETER, METHOD OF FABRICATING THE SAME, AND BOLOMETRIC METHOD

    公开(公告)号:US20180266889A1

    公开(公告)日:2018-09-20

    申请号:US15761082

    申请日:2016-08-12

    CPC classification number: G01J5/20 G01J5/0803 G01J5/0818 G01J5/10

    Abstract: Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may further include a first waveguide over the substrate and coupled to the ring resonator structure, the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer. The bolometer may additionally include a second waveguide over the substrate and coupled to the ring resonator structure, the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase.

    MICRO-MACHINED OPTICAL PRESSURE SENSORS
    2.
    发明申请
    MICRO-MACHINED OPTICAL PRESSURE SENSORS 有权
    微型机械式压力传感器

    公开(公告)号:US20160273980A1

    公开(公告)日:2016-09-22

    申请号:US15036792

    申请日:2014-11-14

    CPC classification number: G01L11/025 G01L9/0076

    Abstract: A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphragm, wherein the sensing micro-ring is configured to produce a resonance wavelength shift when the gap is varied, the resonance wavelength shift indicative of the force applied to the diaphragm.

    Abstract translation: 一种微加工光学压力传感器,包括:膜,其构造成当施加力时变形; 以及通过间隙与所述隔膜间隔开的感测微环,所述间隙根据施加在所述隔膜上的力而变化,其中所述感测微环被配置为当所述间隙变化时产生谐振波长偏移,所述谐振 表示施加到隔膜的力的波长偏移。

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