Photonic device using resonator differencing technique

    公开(公告)号:US11815405B2

    公开(公告)日:2023-11-14

    申请号:US17338313

    申请日:2021-06-03

    申请人: Fluke Corporation

    摘要: A photonic device has a substrate with one or more optical resonators having a first resonant frequency response relative to temperature and a different second resonant frequency response relative to temperature. A first waveguide optically couples a first light beam having a first frequency to a first optical resonator and a second waveguide optically couples a second light beam having a second frequency to a second optical resonator. An optical shifter may shift an optical characteristic of the second light beam. A detector converts output light from the photonic device into an electric signal having a characteristic indicative of a physical condition, such as temperature, of the photonic device. In some cases, output light from the one or more optical resonators is combined and a temperature of the photonic device is determined from a beat frequency in the combined light. One or more multimode optical resonators may be used.

    Methods and apparatus for measuring edge ring temperature

    公开(公告)号:US11664250B2

    公开(公告)日:2023-05-30

    申请号:US17728461

    申请日:2022-04-25

    摘要: An apparatus for measuring a temperature of an assembly that is internal to a process chamber. The apparatus may include a light pipe positioned between a lamp radiation filtering window and the assembly, the light pipe has a first end with a bevel configured to redirect infrared radiation emitted from the assembly through the light pipe and has a second end distal to the first end, an optical assembly configured to collimate, filter, and focus infrared radiation from the second end of the light pipe, an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation, a temperature circuit that transforms the at least one signal into a temperature value, and a controller that is configured to receive the temperature value and to make adjustments to other process parameters of process chamber based on the temperature value.

    GRAPHENE-BASED BOLOMETER
    3.
    发明申请

    公开(公告)号:US20180136047A1

    公开(公告)日:2018-05-17

    申请号:US15869725

    申请日:2018-01-12

    发明人: Kin Chung Fong

    IPC分类号: G01J5/08

    摘要: A bolometer. In one embodiment a graphene sheet is configured to absorb electromagnetic waves. The graphene sheet has two contacts connected to an amplifier, and a power detector connected to the amplifier. Electromagnetic power in the evanescent electromagnetic waves is absorbed in the graphene sheet, heating the graphene sheet. The power of Johnson noise generated at the contacts is proportional to the temperature of the graphene sheet. The Johnson noise is amplified and the power in the Johnson noise is used as a measure of the temperature of the graphene sheet, and of the amount of electromagnetic wave power absorbed by the graphene sheet.

    Bolometer with low scattering for a heat-assisted magnetic recording slider

    公开(公告)号:US09870787B1

    公开(公告)日:2018-01-16

    申请号:US15491592

    申请日:2017-04-19

    摘要: A slider configured for heat-assisted magnetic recording has an upper surface, an opposing air bearing surface (ABS), and a body defined between the upper surface and the ABS. The slider comprises a write pole and a near-field transducer (NFT) at or near the ABS. An optical waveguide is configured to receive light from a laser source and comprises a first cladding layer, a second cladding layer, and a core between the first and second cladding layers. The core has a width, a length, and a longitudinal axis oriented along the length of the core. A bolometer is situated within the body of the slider at a location that receives at least some of the light communicated along the waveguide used during a writing operation. The bolometer is spaced apart from the core and comprises a longitudinal axis that is oriented substantially parallel to the longitudinal axis of the core.

    CONTINUOUS TEMPERATURE MEASURING DEVICE AND RH APPARATUS INCLUDING THE SAME
    7.
    发明申请
    CONTINUOUS TEMPERATURE MEASURING DEVICE AND RH APPARATUS INCLUDING THE SAME 有权
    连续温度测量装置和RH装置

    公开(公告)号:US20160376671A1

    公开(公告)日:2016-12-29

    申请号:US15039494

    申请日:2014-11-24

    摘要: A Ruhrstahl-Heraeus (RH) apparatus for performing a vacuum degassing process of molten metal includes a sensor hole formed at a lower vessel of a vacuum vessel; a continuous temperature measuring device mounted on the sensor hole and including a light-to-temperature converter measuring temperature based on received light, a light guide rod receiving light from a measurement target, an optical fiber transferring the light received by the light guide rod to the light-to-temperature converter, a connector connecting the optical fiber to the light guide rod while maintaining straightness of the optical fiber, a primary protection tube enclosing an outer peripheral surface of the light guide rod, a flexible heat resistant tube protecting the optical fiber, and a joint connected to the flexible heat resistant tube and provided with a cooling gas injection tube; and a cooling gas supply unit supplying cooling gas to the cooling gas injection tube.

    摘要翻译: 用于进行熔融金属的真空脱气处理的鲁尔斯塔赫勒氏(RH)装置包括形成在真空容器的下部容器处的传感器孔; 安装在传感器孔上的连续的温度测量装置,包括基于接收的光测量温度的光温转换器,从测量对象物接收光的导光杆,将由导光杆接收的光传送到 光温转换器,将光纤连接到导光杆同时保持光纤的直线性的连接器,包围导光棒的外周面的主保护管,保护光学器件的柔性耐热管 纤维和连接到柔性耐热管并且设置有冷却气体注入管的接头; 以及向冷却气体注入管供给冷却气体的冷却气体供给部。

    GRAPHENE-BASED INFRARED BOLOMETER
    8.
    发明申请
    GRAPHENE-BASED INFRARED BOLOMETER 有权
    基于石墨的红外测温仪

    公开(公告)号:US20160370232A1

    公开(公告)日:2016-12-22

    申请号:US14794591

    申请日:2015-07-08

    发明人: Kin Chung Fong

    IPC分类号: G01J5/08 G01J5/20

    摘要: An infrared bolometer. In one embodiment a waveguide configured to transmit infrared radiation is arranged to be adjacent a graphene sheet and configured so that evanescent waves from the waveguide overlap the graphene sheet. The graphene sheet has two contacts connected to an amplifier, and a power detector connected to the amplifier. Infrared electromagnetic power in the evanescent waves is absorbed in the graphene sheet, heating the graphene sheet. The power of Johnson noise generated at the contacts is proportional to the temperature of the graphene sheet. The Johnson noise is amplified and the power in the Johnson noise is used as a measure of the temperature of the graphene sheet, and of the amount of infrared power propagating in the waveguide.

    摘要翻译: 红外辐射热量计 在一个实施例中,配置成透射红外辐射的波导被布置成与石墨烯片相邻并且被配置为使得来自波导的消逝波与石墨烯片重叠。 石墨烯片具有连接到放大器的两个触点和连接到放大器的功率检测器。 湮灭波中的红外电磁功率被石墨烯片吸收,加热石墨烯片。 在接触处产生的约翰逊噪声的功率与石墨烯薄片的温度成比例。 约翰逊噪声被放大,约翰逊噪声中的功率被用作测量石墨烯片的温度以及在波导中传播的红外功率的量。

    Surface temperature measuring apparatus and surface temperature measuring method
    9.
    发明授权
    Surface temperature measuring apparatus and surface temperature measuring method 有权
    表面温度测量仪和表面温度测量方法

    公开(公告)号:US09523611B2

    公开(公告)日:2016-12-20

    申请号:US14419376

    申请日:2013-08-21

    摘要: A surface temperature measuring apparatus comprising a radiation thermometer configured to detect thermal radiation light emitted from a surface of a temperature measurement target material in a cooling process with water, a housing having an opening on a temperature measurement target material side, the housing storing, in an inside of the housing, at least a light receiving unit of the radiation thermometer among structural elements of the radiation thermometer, and an optical glass that is fit and sealed in the inside of the housing between the temperature measurement target material and the light receiving unit of the radiation thermometer, the optical glass being configured to transmit the thermal radiation light. The optical glass has, on the temperature measurement target material side, an end surface adjacent to the surface of the temperature measurement target material. A surface temperature measuring method is also provided.

    摘要翻译: 一种表面温度测量装置,包括:辐射温度计,被配置为在水的冷却过程中检测从温度测量目标材料的表面发射的热辐射光;壳体,其在温度测量目标材料侧具有开口;壳体存储在 壳体的内部,辐射温度计的结构元件中的辐射温度计的至少一个光接收单元和在温度测量对象材料和光接收单元之间的壳体内部配合和密封的光学玻璃 的所述辐射温度计,所述光学玻璃被配置为透射所述热辐射光。 光学玻璃在温度测量对象材料侧具有与温度测量对象材料的表面相邻的端面。 还提供了表面温度测量方法。