公开(公告)号：US12100576B2

公开(公告)日：2024-09-24

申请号：US16863541

申请日：2020-04-30

Applicant: APPLIED MATERIALS, INC.

Inventor： Andrew Nguyen ,  Xue Yang Chang ,  Yu Lei ,  Xianmin Tang ,  John C. Forster ,  Yogananda Sarode Vishwanath ,  Abilash Sainath ,  Tza-Jing Gung

IPC: H01J37/32 ,  C23C16/44

CPC classification number: H01J37/32477 ,  C23C16/4412 ,  H01J37/3244 ,  H01J37/32495 ,  H01J37/32633 ,  H01J37/32651

Abstract: Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a process chamber includes: a chamber liner having a tubular body with an upper portion and a lower portion; a confinement plate coupled to the lower portion of the chamber liner and extending radially inward from the chamber liner, wherein the confinement plate includes a plurality of slots; a shield ring disposed within the chamber liner and movable between the upper portion of the chamber liner and the lower portion of the chamber liner; and a plurality of ground straps coupled to the shield ring at a first end of each ground strap of the plurality of ground straps and to the confinement plate at a second end of each ground strap to maintain electrical connection between the shield ring and the chamber liner when the shield ring moves.