公开(公告)号：US20180144960A1

公开(公告)日：2018-05-24

申请号：US15623503

申请日：2017-06-15

Applicant: APPLIED MATERIALS, INC.

Inventor： JUN-LIANG SU ,  KARTHIK ELUMALAI ,  ENG SHENG PEH ,  Sriskantharajah THIRUNAVUKARASU ,  DIMANTHA RAJAPAKSA

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  G01B11/24

Abstract: Systems, apparatuses and methods for determining a surface profile of a substrate are provided. In one embodiment, a method includes projecting a signal having a vertical component/profile across the surface of the substrate from a plurality of locations along a first side of the substrate, capturing the projected signals at each of a plurality of respective locations across the surface of the substrate and determining a surface profile for the substrate using the captured signals. The process can be automated using a controller having predetermined projection and capture positions along respective sides of the substrate, where a surface profile of the substrate can be automatically determined by the controller using the captured signals.