公开(公告)号：US20190326147A1

公开(公告)日：2019-10-24

申请号：US16432568

申请日：2019-06-05

Applicant: APPLIED MATERIALS, INC.

Inventor： SRISKANTHARAJAH THIRUNAVUKARASU ,  ENG SHENG PEH ,  SRINIVAS D. NEMANI ,  ARVIND SUNDARRAJAN ,  AVINASH AVULA ,  ELLIE Y. YIEH ,  MICHAEL RICE ,  GINETTO ADDIEGO

IPC: H01L21/673 ,  B25J11/00

Abstract: Embodiments of a multi-cassette carrying case are provided herein. In some embodiments a method for transporting a substrate from a first processing device to a second processing device includes docking a substrate cassette to a first chamber; pumping down pressure in the substrate cassette; transferring a substrate through the first chamber to the substrate cassette; sealing the substrate cassette and moving the substrate cassette having the substrate disposed therein from the first chamber to a second chamber; docking the substrate cassette to the second chamber; and transferring the substrate from the substrate cassette through the second chamber.

公开(公告)号：US20160133491A1

公开(公告)日：2016-05-12

申请号：US14933651

申请日：2015-11-05

Applicant: APPLIED MATERIALS, INC.

Inventor： SRISKANTHARAJAH THIRUNAVUKARASU ,  ENG SHENG PEH ,  SRINIVAS D. NEMANI ,  ARVIND SUNDARRAJAN ,  AVINASH AVULA ,  ELLIE Y. YIEH ,  MICHAEL RICE ,  GINETTO ADDIEGO

IPC: H01L21/673 ,  B25J11/00

Abstract: Embodiments of multi-cassette carrying cases are provided herein. In some embodiments a multi-cassette carrying case includes: a body having an inner volume; a door coupled to the body to selectively seal off the inner volume; and a plurality of cassette holders disposed in the inner volume to hold one or more substrate cassettes. In some embodiments, a method of transferring substrates includes: placing a substrate in a substrate cassette, wherein an inner volume of the substrate cassette is sealed from an environment outside of the substrate cassette; and placing the substrate cassette in a multi-cassette carrying case.

Abstract translation: 这里提供了多盒式携带箱的实施例。 在一些实施例中，多卡带手提箱包括：具有内部容积的主体; 一个门连接到主体以选择性地密封内部容积; 以及设置在所述内部容积中以容纳一个或多个衬底盒的多个盒座。 在一些实施例中，传送衬底的方法包括：将衬底放置在衬底盒中，其中衬底盒的内部体积与衬底盒外的环境密封; 并将衬底盒放置在多盒式手提箱中。