公开(公告)号：US10269593B2

公开(公告)日：2019-04-23

申请号：US14771494

申请日：2014-03-07

Applicant: APPLIED MATERIALS, INC.

Inventor： Joe Griffith Cruz ,  Hanh Nguyen ,  Randy Vrana ,  Karl Armstrong

IPC: H01L21/67 ,  H01L21/687 ,  C23C16/27

Abstract: Apparatus for coupling a hot wire source to a process chamber is provided herein. In some embodiments, an apparatus for coupling a hot wire source to a process chamber may include: a housing having an open end and a through hole formed through a top and a bottom of the housing; and a filament assembly configured to be disposed within the housing, the filament assembly having a frame and a plurality of filaments disposed across the frame, wherein the plurality of filaments of the filament assembly are substantially parallel with the top and the bottom of the housing and at least a portion of the plurality of filaments are disposed within the through hole of the housing when the filament assembly is disposed within the housing.