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公开(公告)号：US20160077016A1
公开(公告)日：2016-03-17
申请号：US14946693
申请日：2015-11-19
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Yoram Uziel , Ron Naftali , Ofer Adan , Haim Feldman , Ofer Shneyour , Ron Bar-Or
Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
Abstract translation: 可以提供可以包括包括原子力显微镜（AFM）和固体浸没透镜的空间传感器的评估系统。 AFM布置成产生表示固体浸没透镜和基底之间的空间关系的空间关系信息。 所述控制器被布置为接收所述空间关系信息，并且向所述至少一个位置校正元件发送校正信号，以在所述固体浸没透镜和所述基板之间引入期望的空间关系。
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公开(公告)号：US10811219B2
公开(公告)日：2020-10-20
申请号：US16057762
申请日：2018-08-07
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ofer Shneyour , Ron Naftali , Ronnie Porat
IPC: H01J37/28 , H01J37/22 , H01J37/305
Abstract: A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
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公开(公告)号：US09835563B2
公开(公告)日：2017-12-05
申请号：US14946693
申请日：2015-11-19
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Yoram Uziel , Ron Naftali , Ofer Adan , Haim Feldman , Ofer Shneyour , Ron Bar-Or , Doron Korngut
Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.
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公开(公告)号：US20200051777A1
公开(公告)日：2020-02-13
申请号：US16057762
申请日：2018-08-07
Applicant: APPLIED MATERIALS ISRAEL LTD.
Inventor： Ofer Shneyour , Ron Naftali , Ronnie Porat
IPC: H01J37/22 , H01J37/305 , H01J37/28
Abstract: A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
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