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公开(公告)号：US20190106788A1
公开(公告)日：2019-04-11
申请号：US16213702
申请日：2018-12-07
Applicant: ASM IP Holding B.V.
Inventor： Mark Hawkins , Bradley Leonard Halleck , Tom Kirschenheiter , Benjamin Hossa , Clay Pottebaum , Claudio Miskys
IPC: C23C16/52 , C23C16/455
Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
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公开(公告)号：US10604847B2
公开(公告)日：2020-03-31
申请号：US16213702
申请日：2018-12-07
Applicant: ASM IP Holding B.V.
Inventor： Mark Hawkins , Bradley Leonard Halleck , Tom Kirschenheiter , Benjamin Hossa , Clay Pottebaum , Claudio Miskys
IPC: C23C16/455 , C23C16/52
Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
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公开(公告)号：US10167557B2
公开(公告)日：2019-01-01
申请号：US14218690
申请日：2014-03-18
Applicant: ASM IP Holding B.V.
Inventor： Mark Hawkins , Bradley Leonard Halleck , Tom Kirschenheiter , Benjamin Hossa , Clay Pottebaum , Claudio Miskys
IPC: C23C16/455 , C23C16/52
Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
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4.发明申请GAS DISTRIBUTION SYSTEM, REACTOR INCLUDING THE SYSTEM, AND METHODS OF USING THE SAME 审中-公开气体分配系统，包括系统的反应器及其使用方法公开(公告)号：US20150267299A1
公开(公告)日：2015-09-24
申请号：US14218690
申请日：2014-03-18
Applicant: ASM IP Holding B.V.
Inventor： Mark Hawkins , Bradley Leonard Halleck , Tom Kirschenheiter , Benjamin Hossa , Clay Pottebaum , Claudio Miskys
IPC: C23C16/52 , G05D7/06 , C23C16/455
CPC classification number: C23C16/52 , C23C16/45502 , C23C16/45523 , C23C16/45561 , C23C16/45574 , Y10T137/87249 , Y10T137/87877
Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently fine tune gas source locations and gas flow rates of reactants to a reaction chamber of the reactor systems.
Abstract translation: 公开了一种气体分配系统，包括气体分配系统的反应器系统以及使用气体分配系统和反应器系统的方法。 气体分配系统可以用于气相反应器系统，以独立地微调反应器的反应物体的气源位置和气体流量。
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