公开(公告)号：US09899291B2

公开(公告)日：2018-02-20

申请号：US14798136

申请日：2015-07-13

Applicant: ASM IP Holding B.V.

Inventor： Richika Kato ,  Seiji Okuro ,  Kunitoshi Namba ,  Yuya Nonaka ,  Akinori Nakano

IPC: H01L23/31 ,  H01L21/02 ,  H01L21/324

CPC classification number: H01L23/3192 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/324

Abstract: A method for protecting a layer includes: providing a substrate having a target layer and forming a protective layer on the target layer, said protective layer contacting and covering the target layer and containing a hydrocarbon-based layer constituting at least an upper part of the protective layer, which hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.

公开(公告)号：US20170018477A1

公开(公告)日：2017-01-19

申请号：US14798136

申请日：2015-07-13

Applicant: ASM IP Holding B.V.

Inventor： Richika Kato ,  Seiji Okuro ,  Kunitoshi Namba ,  Yuya Nonaka ,  Akinori Nakano

IPC: H01L23/31 ,  H01L21/324 ,  H01L21/02

CPC classification number: H01L23/3192 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/324

Abstract: A method for protecting a layer includes: providing a substrate having a target layer and forming a protective layer on the target layer, said protective layer contacting and covering the target layer and containing a hydrocarbon-based layer constituting at least an upper part of the protective layer, which hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.

Abstract translation: 一种保护层的方法包括：提供具有目标层并在靶层上形成保护层的衬底，所述保护层与目标层接触并覆盖，并含有至少构成保护层上部的烃基层 层，通过使用烷基氨基硅烷前体的等离子体增强原子层沉积（PEALD）和没有反应物的惰性气体形成烃基层。