公开(公告)号：US20160273906A1

公开(公告)日：2016-09-22

申请号：US15036471

申请日：2014-11-04

Applicant: ASML NETHERLANDS B .V.

Inventor： Maxim PISARENCO ,  Irwan Dani SETIJA

IPC: G01B11/02

CPC classification number: G01B11/02 ,  G03F7/705 ,  G03F7/70625 ,  G03F7/70633

Abstract: In scatterometry, a merit function including a regularization parameter is used in an iterative process to find values for the scattering properties of the measured target. An optimal value for the regularization parameter is obtained for each measurement target and in each iteration of the iterative process. Various methods can be used to find the value for the regularization parameter, including the Discrepancy Principle, the chi-squared method and novel modifications of the Discrepancy Principle and the chi-squared method including a merit function.

Abstract translation: 在散射法中，在迭代过程中使用包括正则化参数的优值函数来查找测量目标的散射特性的值。 为每个测量目标和迭代过程的每次迭代获得正则化参数的最优值。 可以使用各种方法来找出正则化参数的值，包括差异原理，卡方法和差异原理的新颖修改以及包括优值函数的卡方法。

公开(公告)号：US20200241433A1

公开(公告)日：2020-07-30

申请号：US16639566

申请日：2018-07-02

Applicant: ASML Netherlands B,V.

Inventor： Simon Reinald HUISMAN ,  Sebastianus Adrianus GOORDEN ,  Irwan Dani SETIJA

IPC: G03F9/00

Abstract: An apparatus for determining a characteristic of a feature of an object comprises: a measurement radiation source; a measurement radiation delivery system; a measurement system; a pump radiation source; and a pump radiation delivery system. The measurement radiation source is operable to produce measurement radiation and the measurement radiation delivery system is operable to irradiate at least a part of a top surface of the object with the measurement radiation. The measurement system is operable to receive at least a portion of the measurement radiation scattered from the top surface and is further operable to determine a characteristic of the feature of the object from at least a portion of the measurement radiation scattered from the top surface. The pump radiation source is operable to produce pump radiation and the pump radiation delivery system is operable to irradiate at least a part of the top surface of the object with the pump radiation so as to produce a mechanical response (for example an acoustic wave) in the object.