公开(公告)号：US09977349B2

公开(公告)日：2018-05-22

申请号：US15109427

申请日：2014-12-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Hans Butler ,  Cornelius Adrianus Lambertus De Hoon ,  Ingmar August Kerp ,  Pieter Johannes Gertrudis Meijers ,  Jeroen Pieter Starreveld ,  Derk Ten Hoopen ,  Martinus Van Duijnhoven ,  Edward Hage ,  Evert Hendrik Jan Draaijer ,  Wesley Ooms

IPC: G03F7/20 ,  F16F15/023

CPC classification number: G03F7/70866 ,  F16F15/0232 ,  G03F7/70733 ,  G03F7/70833 ,  G03F7/709

Abstract: A support device configured to support a first part relative to a second part, minimizing the transfer of vibration between the two parts, includes a supporting system configured to use gas under pressure to provide a support force between the first and second parts; a gas chamber connected to the supporting system and configured to contain the gas under pressure and provide the gas under pressure to the supporting system; and a section of acoustic damping material, arranged at a location within the gas chamber so as to separate a first gas containing region and a second gas containing region within the gas chamber, wherein the section of acoustic damping material has a first side and a second side, wherein the first gas containing region is on the first side and the second gas containing region is on the second side.