公开(公告)号：US20170212431A1

公开(公告)日：2017-07-27

申请号：US15129380

申请日：2015-04-01

Applicant: ASML Netherlands B.V.

Inventor： Marinus Maria Johannes VAN DE WAL ,  Wilhelmus Henricus Theodorus Maria AANGENENT ,  Jeroen Johannes Theodorus Hendrikus DE BEST ,  Jan VAN EIJK

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/70725 ,  G03F7/70783 ,  G03F7/709

Abstract: A control system for a positioning system, for positioning a driven object, e.g. in a lithographic apparatus, in N dimensions has M sensors, where M>N. A transformation module converts the M measurements by the sensors into a positional estimate in N dimensions taking into account compliance of the driven object.

公开(公告)号：US20170277042A1

公开(公告)日：2017-09-28

申请号：US15505885

申请日：2015-07-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Antonius Gerardus AKKERMANS ,  Ruud Antonius Catharina Maria BEERENS ,  Sander Christiaan BROERS ,  Jeroen Johannes Theodorus Hendrikus DE BEST ,  Adrianus Marinus Wouter HEEREN ,  George Alois Leonie LEENKNEGT ,  Bo LENSSEN ,  Hendrikus Johannes SCHELLENS ,  Peter VAN DER KRIEKEN ,  Theodorus Petrus Maria CADEE ,  Jan VAN EIJK ,  Richard Henricus Adrianus VAN LIESHOUT

IPC: G03F7/20 ,  G01L1/16

CPC classification number: G03F7/70775 ,  G01L1/16 ,  G01P15/0915 ,  G01P15/18 ,  G03F7/70716 ,  G03F7/70783 ,  G03F7/7085

Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.