公开(公告)号：US20170277042A1

公开(公告)日：2017-09-28

申请号：US15505885

申请日：2015-07-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Antonius Gerardus AKKERMANS ,  Ruud Antonius Catharina Maria BEERENS ,  Sander Christiaan BROERS ,  Jeroen Johannes Theodorus Hendrikus DE BEST ,  Adrianus Marinus Wouter HEEREN ,  George Alois Leonie LEENKNEGT ,  Bo LENSSEN ,  Hendrikus Johannes SCHELLENS ,  Peter VAN DER KRIEKEN ,  Theodorus Petrus Maria CADEE ,  Jan VAN EIJK ,  Richard Henricus Adrianus VAN LIESHOUT

IPC: G03F7/20 ,  G01L1/16

CPC classification number: G03F7/70775 ,  G01L1/16 ,  G01P15/0915 ,  G01P15/18 ,  G03F7/70716 ,  G03F7/70783 ,  G03F7/7085

Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.

公开(公告)号：US20170031249A1

公开(公告)日：2017-02-02

申请号：US15303192

申请日：2015-04-15

Applicant: ASML Netherlands B.V.

Inventor： Sander Christiaan BROERS

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/70716 ,  G03F7/70991

Abstract: The invention relates to a lithographic apparatus comprising: a first object, a second object which is moveable relative to the first object in a moving direction, a set of cables and/or tubing arranged between the first object and the second object, a guiding drum to guide the set of cables and/or tubing, said guiding drum being rotatable about a rotation axis extending perpendicular to the moving direction, a drum positioning device to position the guiding drum such that it follows movement of the set of cables and/or tubing caused by movement of the second object relative to the first object and a guiding structure to guide movement of the guiding drum in the moving direction.

Abstract translation: 本发明涉及一种光刻设备，包括：第一物体，相对于第一物体在移动方向上可移动的第二物体，布置在第一物体和第二物体之间的一组电缆和/或管道，引导鼓 以引导所述一组电缆和/或管道，所述导向鼓可围绕垂直于移动方向延伸的旋转轴线旋转;滚筒定位装置，用于定位所述引导滚筒，使得所述引导筒随着所述一组电缆和/或管道的移动 由第二物体相对于第一物体的运动引起的引导结构以引导引导鼓在移动方向上的移动。

公开(公告)号：US20130162968A1

公开(公告)日：2013-06-27

申请号：US13686854

申请日：2012-11-27

Applicant: ASML Netherlands B.V.

Inventor： Antonius Franciscus Johannes DE GROOT ,  Raymond Wilhelmus Louis LAFARRE ,  Yang-Shan HUANG ,  Sander Christiaan BROERS ,  Peter Laurentius Maria ROS

IPC: G03B27/58

CPC classification number: G03F7/70758 ,  G03B27/58 ,  G03F7/70775

Abstract: A movable stage system is configured to support an object. The stage system comprises an object table configured to support the object and an object table support defining an object table support surface configured to support the object table. The object table support comprises at least one first actuator to drive the object table support in a first driving direction substantially parallel to the object table support surface. In a projection on a plane parallel to the object table support surface the at least one actuator is spaced with respect to the object table in a direction perpendicular to the first driving direction such that the risk on slip between the object table support and the object table supported thereon is decreased.

Abstract translation: 可移动台系统被配置为支撑物体。 舞台系统包括被配置为支撑对象的对象表和定义被配置为支持对象表的对象表支持表面的对象表支持。 物体台支撑件包括至少一个第一致动器，以在基本上平行于物体台支撑表面的第一驱动方向上驱动物体台支撑件。 在与物体台支撑表面平行的平面上的突起中，至少一个致动器在垂直于第一驱动方向的方向上相对于物体台间隔开，使得物体台支撑件和物体台之间的滑动风险 支撑在其上。