公开(公告)号：US20240160110A1

公开(公告)日：2024-05-16

申请号：US18420091

申请日：2024-01-23

Applicant: ASML Netherlands B.V.

Inventor： Jasper WINTERS ,  Erwin John VAN ZWET ,  Marcus Johannes VAN DER LANS ,  Pieter Willem Herman DE JAGER ,  Geerten Frans Ijsbrand KRAMER

IPC: G03F7/00

CPC classification number: G03F7/70291 ,  G03F7/70508 ,  G03F7/70558

Abstract: A method for improved sequencing of light delivery in a lithographic process includes determining a sequence of intensities of light to be delivered that includes an interval within the sequence of intensities where substantially no light is delivered to the substrate and delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the sequence of intensities.

公开(公告)号：US20240329548A1

公开(公告)日：2024-10-03

申请号：US18415586

申请日：2024-01-17

Applicant: ASML Netherlands B.V.

Inventor： Jasper WINTERS ,  Erwin John VAN ZWET ,  Marcus Johannes VAN DER LANS ,  Pieter Willem Herman DE JAGER ,  Emiel Anton VAN DE VEN

IPC: G03F7/00

CPC classification number: G03F7/70833 ,  G03F7/70791 ,  G03F7/70891

Abstract: Systems and methods are disclosed for stabilizing an optical column. One system can include an optical column; a frame configured to support the optical column, the frame having a first coefficient of thermal expansion (CTE); and a subframe configured to be coupled to the optical column in at least two places by a first anchor and a second anchor to stabilize the optical column against a displacement or a rotation caused by thermal expansion in the frame or the optical column, the subframe having a second CTE lower than the first CTE.

公开(公告)号：US20250021012A1

公开(公告)日：2025-01-16

申请号：US18577035

申请日：2022-06-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Jasper WINTERS ,  Erwin John VAN ZWET ,  Marcus Johannes VAN DER LANS ,  Pieter, Willem Herman DE JAGER ,  Emiel Anton VAN DE VEN

IPC: G03F7/00

Abstract: A method of use for a lithographic tool includes scanning a substrate relative to a first micro-lens array (MLA) and a second MLA each having rows of lenslets. The first MLA has functional lenslets and extra lenslets and the scanning includes delivering light through the lenslets of the first MLA and second MLA to the substrate. The delivering includes delivering light through the functional lenslets to form a pattern on the substrate, the pattern having gaps caused by a positional or rotational misalignment between the functional lenslets of the first MLA and the second MLA. The delivering also includes delivering light through the extra lenslets to fill the gaps in the pattern.