公开(公告)号：US20240069450A1

公开(公告)日：2024-02-29

申请号：US18267734

申请日：2021-12-08

Applicant: ASML Netherlands B.V.

Inventor： Nabeel Noor MOIN ,  Chenxi LIN ,  Yi ZOU

IPC: G03F7/00 ,  G06N20/20

CPC classification number: G03F7/7065 ,  G03F7/706841 ,  G06N20/20

Abstract: A method and apparatus for training a defect location prediction model to predict a defect for a substrate location is disclosed. A number of datasets having data regarding process-related parameters for each location on a set of substrates is received. Some of the locations have partial datasets in which data regarding one or more process-related parameters is absent. The datasets are processed to generate multiple parameter groups having data for different sets of process-related parameters. For each parameter group, a sub-model of the defect location prediction model is created based on the corresponding set of process-related parameters and trained using data from the parameter group. A trained sub-model(s) may be selected based on process-related parameters available in a candidate dataset and a defect prediction may be generated for a location associated with the candidate dataset using the selected sub-model.

公开(公告)号：US20230401694A1

公开(公告)日：2023-12-14

申请号：US18033786

申请日：2021-11-02

Applicant: ASML NETHERLANDS B.V.

Inventor： Chenxi LIN ,  Yi ZOU ,  Tanbir HASAN ,  Huina XU ,  Ren-Jay KOU ,  Nabeel Noor MOIN ,  Kourosh NAFISI

IPC: G06T7/00

CPC classification number: G06T7/001 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: A method and apparatus for identifying locations to be inspected on a substrate is disclosed. A defect location prediction model is trained using a training dataset associated with other substrates to generate a prediction of defect or non-defect and a confidence score associated with the prediction for each of the locations based on process-related data associated with the substrates. Those of the locations determined by the defect location prediction model as having confidences scores satisfying a confidence threshold are added to a set of locations to be inspected by an inspection system. After the set of locations are inspected, the inspection results data is obtained, and the defect location prediction model is incrementally trained by using the inspection results data and process-related data for the set of locations as training data.