公开(公告)号：US20240004319A1

公开(公告)日：2024-01-04

申请号：US18039487

申请日：2021-11-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Willem Richard PONGERS ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GOTZ ,  Ludovicus VAN DEN OETELAAR

IPC: G03F9/00 ,  G03F7/00 ,  G02F1/35

CPC classification number: G03F9/7065 ,  G03F7/70625 ,  G03F7/70633 ,  G02F1/3528 ,  G02F1/365

Abstract: A radiation source for generating broadband radiation, the source including: a pump source having only one single fiber amplifier configured to generate pump radiation including a plurality of radiation pulses having a pulse energy of 2.5 μJ or less; and a hollow core fiber having a hollow core region and a cladding surrounding the hollow core region, the hollow core region having a pressurized gas therein, and the hollow core fiber being arranged to receive, at an input end, the pump radiation, wherein the hollow core region is dimensioned such that the radiation pulses have a soliton order higher than 16 so as to broaden a spectrum of the pump radiation using modulation instability as the pump radiation propagates along the hollow-core fiber, for providing output broadband radiation from an output end of the hollow core fiber.

公开(公告)号：US20200285129A1

公开(公告)日：2020-09-10

申请号：US16808141

申请日：2020-03-03

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GOTZ

IPC: G02F1/35

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.