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公开(公告)号：US20240160151A1
公开(公告)日：2024-05-16
申请号：US18280459
申请日：2022-03-04
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N. V.
Inventor： Willem Marie Julia Marcel COENE , Vasco Tomas TENNER , Hugo Augustinus Joseph CRAMER , Arie Jeffrrey DEN BOEF , Wouter Dick KOEK , Sergei SOKOLOV , Jeroen Johan Maarten VAN DE WIJDEVEN , Alexander Kenneth RAUB
CPC classification number: G03H1/0486 , G01N21/9501 , G02B21/10 , G02B21/365 , G03H1/0866 , G03H2001/0038 , G03H2001/0044 , G03H2001/005 , G03H2001/0232 , G03H2001/0445 , G03H2001/0473 , G03H2210/62
Abstract: A method of correcting a holographic image, a processing device, a dark field digital holographic microscope, a metrology apparatus and an inspection apparatus. The method includes obtaining a holographic image; determining at least one attenuation function due to motion blur from the holographic image; and correcting the holographic image, or a portion thereof, using the at least one attenuation function.
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公开(公告)号：US20240085379A1
公开(公告)日：2024-03-14
申请号：US18268467
申请日：2021-12-15
Applicant: ASML Netherlands B.V.
Inventor： Mustafa Ümit ARABUL , Zili ZHOU , Willem Marie,Julia,Marcel COENE , Coen Adrianus VERSCHUREN , Paul, Louis,Maria Joseph VAN NEER , Daniele PIRAS , Sandra BLAAK , Wouter Dick KOEK , Robert Wilhelm WILLEKERS
CPC classification number: G01N29/04 , G01N29/262 , G01N29/28 , G01N2291/023 , G01N2291/106
Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.
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