公开(公告)号：US20180046737A1

公开(公告)日：2018-02-15

申请号：US15559759

申请日：2016-03-24

Applicant: ASML Netherlands B.V.

Inventor： Lotte Marloes WILLEMS ,  Kaustuve BHATTACHARYYA ,  Panagiotis Peter BINTEVINOS ,  Guangqing CHEN ,  Martin EBERT ,  Pieter Jacob Mathias Hendrik KNELISSEN ,  Stephen MORGAN ,  Maurits VAN DER SCHAAR ,  Leonardus Hericus Marie VERSTAPPEN ,  Jen-Shiang WANG ,  Peter Hanzen WARDENIER

IPC: G06F17/50 ,  G03F7/20

CPC classification number: G06F17/5009 ,  G03F7/705 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70683 ,  G03F9/7046 ,  G06F2217/16

Abstract: A method including performing a simulation to evaluate a plurality of metrology targets and/or a plurality of metrology recipes used to measure a metrology target, identifying one or more metrology targets and/or metrology recipes from the evaluated plurality of metrology targets and/or metrology recipes, receiving measurement data of the one or more identified metrology targets and/or metrology recipes, and using the measurement data to tune a metrology target parameter or metrology recipe parameter.