公开(公告)号：US20030108306A1

公开(公告)日：2003-06-12

申请号：US10021765

申请日：2001-12-12

Applicant: AXSUN Technologies, Inc.

Inventor： Peter S. Whitney ,  Jeffrey A. Korn ,  Michael F. Miller ,  Raymond V. Pourmand

IPC: G02B006/42

CPC classification number: G02B6/29362 ,  G02B6/29395 ,  G02B6/4215 ,  G02B6/4251 ,  G02B6/4265 ,  G02B6/4271 ,  G02B6/4285 ,  G02B6/4286

Abstract: In optoelectronic systems, package moisture can affect stress levels in dielectric coatings on MEMS devices. Specifically, as the moisture content in these dielectric coatings changes, there are concomitant changes in the material stress. These changes in material stress can affect the operation of the overall MEMS device. Specifically, in the context of tunable filters, moisture can lead to a drift in the size of the optical resonant cavity over time as changes in material stress affect the MEMS structures. According to the invention, a getter is added to the package to absorb moisture, and thereby stabilize the operation of the optical filter, and specifically prevent uncontrolled drift in the size of its optical cavity.

Abstract translation: 在光电子系统中，封装湿度可以影响MEMS器件上的介电涂层中的应力水平。 具体来说，随着这些电介质涂层中的水分含量发生变化，材料应力随之发生变化。 材料应力的这些变化可能会影响整个MEMS器件的运行。 具体地说，在可调滤波器的上下文中，随着材料应力的变化影响MEMS结构，水分会随着时间的推移导致光学谐振腔的尺寸的漂移。 根据本发明，将吸气剂添加到包装中以吸收水分，从而稳定滤光器的操作，并且特别地防止其光腔的尺寸的不受控制的漂移。