公开(公告)号：US20230009000A1

公开(公告)日：2023-01-12

申请号：US17370274

申请日：2021-07-08

Applicant: Advanced Energy Industries, Inc.

Inventor： Jason Errett ,  Terry Stapleton

IPC: G01K11/32 ,  H01L21/67

Abstract: A plasma processing chamber optical temperature sensor is disclosed. The plasma processing chamber optical temperature sensor includes a light source, a light detector, and a means for transmitting light through a wall of a plasma processing chamber. An optical temperature sensing element is thermally coupled to a plasma processing chamber component within the plasma processing chamber. The optical temperature sensing element includes a monolithic crystalline phosphor element configured to be excited by light from the light source and to emit light back to the light detector indicative of a temperature of the monolithic crystalline phosphor element.

公开(公告)号：US11573133B2

公开(公告)日：2023-02-07

申请号：US17370274

申请日：2021-07-08

Applicant: Advanced Energy Industries, Inc.

Inventor： Jason Errett ,  Terry Stapleton

IPC: G01K11/32 ,  H01L21/67

Abstract: A plasma processing chamber optical temperature sensor is disclosed. The plasma processing chamber optical temperature sensor includes a light source, a light detector, and a means for transmitting light through a wall of a plasma processing chamber. An optical temperature sensing element is thermally coupled to a plasma processing chamber component within the plasma processing chamber. The optical temperature sensing element includes a monolithic crystalline phosphor element configured to be excited by light from the light source and to emit light back to the light detector indicative of a temperature of the monolithic crystalline phosphor element.

公开(公告)号：US11692883B2

公开(公告)日：2023-07-04

申请号：US17082577

申请日：2020-10-28

Applicant: Advanced Energy Industries, Inc.

Inventor： Terry Stapleton ,  Jason Errett

IPC: G01J3/28 ,  G01K11/3213 ,  G02B6/26 ,  G01N21/17 ,  G01N21/63 ,  G01N21/64

CPC classification number: G01K11/3213 ,  G01N21/17 ,  G01N21/63 ,  G01N21/64 ,  G02B6/264 ,  G01N2201/08 ,  G01N2201/088

Abstract: A fiber optic temperature probe is disclosed. The fiber optic temperature probe includes a probe shaft containing an optical fiber. An optical temperature sensor element is coupled to the probe shaft and configured to be excited by light from the optical fiber and emit light back to the optical fiber. A thermally conductive plate is coupled to the probe shaft and interfaces with the optical temperature sensor element. Baffling extends from the probe shaft and surrounds the edges of the thermally conductive plate.

公开(公告)号：US20220128417A1

公开(公告)日：2022-04-28

申请号：US17082577

申请日：2020-10-28

Applicant: Advanced Energy Industries, Inc.

Inventor： Terry Stapleton ,  Jason Errett

IPC: G01K11/32 ,  G02B6/26

Abstract: A fiber optic temperature probe is disclosed. The fiber optic temperature probe includes a probe shaft containing an optical fiber. An optical temperature sensor element is coupled to the probe shaft and configured to be excited by light from the optical fiber and emit light back to the optical fiber. A thermally conductive plate is coupled to the probe shaft and interfaces with the optical temperature sensor element. Baffling extends from the probe shaft and surrounds the edges of the thermally conductive plate.