Abstract:
A laser patterning apparatus for a three-dimensional object includes a laser generator, a beam expander configured to adjust a size of a laser beam generated by the laser generator, a dynamic focusing module configured to adjust a z-axis focus position of the laser beam passing through the beam expander, a scan head configured to adjust x- and y-axis focus position of the laser beam passing through the beam expander, a shape recognizer configured to recognize a shape of a three-dimensional object, and a controller configured to extract x-, y-, and z-axis data of the three-dimensional object and to control the scan head and the dynamic focusing module, in order to pattern the three-dimensional object with the laser beam.
Abstract:
The present invention relates to lighting apparatus for measuring an electronic material-processed part and the test apparatus using the same. The lighting apparatus includes a dome reflection plate 12 disposed over the subject of measurement and configured to have a dome form, have a light inflow window 11 through which coaxial illumination enters or exits formed at a central part of a highest end of the dome reflection plate 12, and have incident light reflected in all directions within the dome; a plurality of dome illumination lamps 13 disposed at lower edge portions of the dome reflection plate 12 and configured to illuminate the inside of the dome; and a camera 20 disposed right over the light inflow window 11 for the coaxial illumination of the dome reflection plate 12. The lighting apparatus illuminates a processing part, that is, the subject of measurement.