LIGHTING APPARATUS FOR MEASURING ELECTRONIC MATERIAL-PROCESSED PART AND TEST APPARATUS USING THE SAME
    2.
    发明申请
    LIGHTING APPARATUS FOR MEASURING ELECTRONIC MATERIAL-PROCESSED PART AND TEST APPARATUS USING THE SAME 审中-公开
    用于测量电子材料加工部件的照明装置和使用其的测试装置

    公开(公告)号:US20140132750A1

    公开(公告)日:2014-05-15

    申请号:US13742321

    申请日:2013-01-15

    Abstract: The present invention relates to lighting apparatus for measuring an electronic material-processed part and the test apparatus using the same. The lighting apparatus includes a dome reflection plate 12 disposed over the subject of measurement and configured to have a dome form, have a light inflow window 11 through which coaxial illumination enters or exits formed at a central part of a highest end of the dome reflection plate 12, and have incident light reflected in all directions within the dome; a plurality of dome illumination lamps 13 disposed at lower edge portions of the dome reflection plate 12 and configured to illuminate the inside of the dome; and a camera 20 disposed right over the light inflow window 11 for the coaxial illumination of the dome reflection plate 12. The lighting apparatus illuminates a processing part, that is, the subject of measurement.

    Abstract translation: 本发明涉及用于测量电子材料处理部件的照明装置和使用其的测试装置。 照明装置包括设置在测量对象上并配置为具有圆顶形状的圆顶反射板12,具有光入射窗11,同轴照明通过该入射窗11在圆顶反射板的最高端的中心部分处形成 12,圆顶内的各个方向都有入射光; 多个穹顶照明灯13,设置在穹顶反射板12的下边缘部分,并配置成照亮穹顶内部; 以及设置在光入射窗11的正上方,用于圆顶反射板12的同轴照明的照相机20.照明装置照亮处理部分,即测量对象。

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