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    Pulsed mass flow delivery system and method
    1.
    发明申请
    Pulsed mass flow delivery system and method 有权
    脉冲质量流量输送系统及方法

    公开(公告)号：US20050223979A1

    公开(公告)日：2005-10-13

    申请号：US10822358

    申请日：2004-04-12

    申请人： Ali Shajii ,  Siddharth Nagarkatti ,  Matthew Besen ,  William Clark ,  Daniel Smith ,  Bora Akgerman

    发明人： Ali Shajii ,  Siddharth Nagarkatti ,  Matthew Besen ,  William Clark ,  Daniel Smith ,  Bora Akgerman

    IPC分类号： C23C16/44 ,  C23C16/452 ,  C23C16/455 ,  C23C16/52 ,  B05C11/00 ,  B01D59/44 ,  C23C16/00 ,  H01J49/00

    CPC分类号： C23C16/45544 ,  C23C16/45527 ,  C23C16/45557 ,  C23C16/52 ,  Y10S438/935

    摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

    摘要翻译： 一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置 以及连接到阀门，压力传感器和输入装置的控制器。 控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。 然后将控制器编程为等待预定的等待时间段以允许室内的气体接近平衡状态，然后在时间= 0℃下打开出口阀，并在时间关闭出口阀 当排出的气体质量等于所需质量时，= t *。

    Pulsed mass flow delivery system and method
    3.
    发明申请
    Pulsed mass flow delivery system and method 审中-公开
    脉冲质量流量输送系统及方法

    公开(公告)号：US20070039550A1

    公开(公告)日：2007-02-22

    申请号：US11588085

    申请日：2006-10-26

    申请人： Ali Shajii ,  Siddharth Nagarkatti ,  Matthew Besen ,  William Clark ,  Daniel Smith ,  Bora Akgerman

    发明人： Ali Shajii ,  Siddharth Nagarkatti ,  Matthew Besen ,  William Clark ,  Daniel Smith ,  Bora Akgerman

    IPC分类号： H01L21/306 ,  C23C16/00

    CPC分类号： C23C16/45544 ,  C23C16/45527 ,  C23C16/45557 ,  C23C16/52 ,  Y10S438/935

    摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

    摘要翻译： 一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置 以及连接到阀门，压力传感器和输入装置的控制器。 控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。 然后将控制器编程为等待预定的等待时间段以允许室内的气体接近平衡状态，然后在时间= 0℃下打开出口阀，并在时间关闭出口阀 当排出的气体质量等于所需质量时，= t *。

    Flow measurement calibration
    5.
    发明申请
    Flow measurement calibration 审中-公开
    流量测量校准

    公开(公告)号：US20050217346A1

    公开(公告)日：2005-10-06

    申请号：US10819639

    申请日：2004-04-06

    申请人： Siddharth Nagarkatti ,  William Clark ,  Ali Shajii

    发明人： Siddharth Nagarkatti ,  William Clark ,  Ali Shajii

    IPC分类号： G01F25/00 ,  G01P21/00

    CPC分类号： G01F25/0053 ,  G01F25/0015

    摘要： A flow measurement calibration system and method is presented that actively regulates the pressure of the fluid being tested. A piston is slidably mounted to an inner wall of a chamber, which has a fluid inlet port for receiving an inflow of fluid into the interior of the chamber. The piston moves through the length of the chamber in response to fluid pressure exerted by the fluid flowing into the chamber. A piston actuator imparts motion to the piston, in response to command signals from a controller. The controller is responsive to the output of a pressure sensor, which senses the fluid pressure, and a position/velocity sensor, which senses the position and velocity of the piston. The controller commands the piston actuator to dynamically adjust the position and velocity of the piston so that the fluid pressure remains substantially constant at a desired setpoint.

    摘要翻译： 提出了一种流量测量校准系统和方法，其主动地调节被测流体的压力。 活塞可滑动地安装到腔室的内壁上，所述腔体的内壁具有用于接收流体进入腔室内部的流体入口。 活塞响应于流入室内的流体施加的流体压力而移动通过室的长度。 响应于来自控制器的命令信号，活塞致动器向活塞施加运动。 控制器响应于感测流体压力的压力传感器的输出，以及感测活塞的位置和速度的位置/速度传感器。 控制器命令活塞致动器动态地调节活塞的位置和速度，使得流体压力基本保持恒定在所需的设定点。

    Pulsed mass flow delivery system and method
    7.
    发明授权
    Pulsed mass flow delivery system and method 有权
    脉冲质量流量输送系统及方法

    公开(公告)号：US07829353B2

    公开(公告)日：2010-11-09

    申请号：US11586782

    申请日：2006-10-26

    申请人： Ali Shajii ,  Siddharth P. Nagarkatti ,  Matthew Mark Besen ,  William R. Clark ,  Daniel Alexander Smith ,  Bora Akgerman

    发明人： Ali Shajii ,  Siddharth P. Nagarkatti ,  Matthew Mark Besen ,  William R. Clark ,  Daniel Alexander Smith ,  Bora Akgerman

    IPC分类号： H01L21/00

    CPC分类号： C23C16/45544 ,  C23C16/45527 ,  C23C16/45557 ,  C23C16/52 ,  Y10S438/935

    摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

    摘要翻译： 一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置 以及连接到阀门，压力传感器和输入装置的控制器。 控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。 然后将控制器编程为等待预定的等待时间，以允许室内的气体达到平衡状态，然后在时间= t0时打开出口阀，并且当气体质量在时间= t *时关闭出口阀 放电等于所需质量。

    Pulsed mass flow delivery system and method
    8.
    发明授权
    Pulsed mass flow delivery system and method 有权
    脉冲质量流量输送系统及方法

    公开(公告)号：US07615120B2

    公开(公告)日：2009-11-10

    申请号：US11588042

    申请日：2006-10-26

    申请人： Ali Shajii ,  Siddharth P. Nagarkatti ,  Matthew Mark Besen ,  William R. Clark ,  Daniel Alexander Smith ,  Bora Akgerman

    发明人： Ali Shajii ,  Siddharth P. Nagarkatti ,  Matthew Mark Besen ,  William R. Clark ,  Daniel Alexander Smith ,  Bora Akgerman

    IPC分类号： C23C16/455 ,  C23C16/52 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

    CPC分类号： C23C16/45544 ,  C23C16/45527 ,  C23C16/45557 ,  C23C16/52 ,  Y10S438/935

    摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

    摘要翻译： 一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置 以及连接到阀门，压力传感器和输入装置的控制器。 控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。 然后将控制器编程为等待预定的等待时间，以允许室内的气体达到平衡状态，然后在时间= t0时打开出口阀，并且当气体质量在时间= t *时关闭出口阀 放电等于所需质量。

    Radio Frequency Power Delivery System
    9.
    发明申请
    Radio Frequency Power Delivery System 有权
    射频供电系统

    公开(公告)号：US20070139122A1

    公开(公告)日：2007-06-21

    申请号：US11554979

    申请日：2006-10-31

    申请人： Siddharth Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy Kalvaitis ,  William McKinney ,  Daniel Goodman ,  William Holber ,  John Smith

    发明人： Siddharth Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy Kalvaitis ,  William McKinney ,  Daniel Goodman ,  William Holber ,  John Smith

    IPC分类号： H03F3/191

    CPC分类号： H03F1/56 ,  H03F3/191 ,  H03F3/20

    摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    SYSTEM AND METHOD FOR CONTROLLING PRESSURE IN REMOTE ZONES
    10.
    发明申请
    SYSTEM AND METHOD FOR CONTROLLING PRESSURE IN REMOTE ZONES 有权
    用于控制远程区域压力的系统和方法

    公开(公告)号：US20050199287A1

    公开(公告)日：2005-09-15

    申请号：US10796723

    申请日：2004-03-09

    申请人： Ali Shajii ,  Siddharth Nagarkatti

    发明人： Ali Shajii ,  Siddharth Nagarkatti

    IPC分类号： F16K31/12 ,  F16K31/36 ,  G05D7/06

    CPC分类号： G05D16/206 ,  G05D16/2053 ,  Y10T137/0396 ,  Y10T137/7761

    摘要： A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device for controlling the valves, and a zone pressure estimator. The zone pressure estimator is connected to the pressure transducers and is programmed to calculate an estimated pressure in each the i zones and provide the estimated pressures to the control device.

    摘要翻译： 用于控制通过i线的流体流动的系统，其中i线分别通过管道连接到i区域，并且其中i = 1,2。 。 。 该系统包括在i行中的每一个中的至少一个阀和压力传感器，用于控制阀的控制装置和区域压力估计器。 区域压力估计器连接到压力传感器，并被编程为计算每个i区域中的估计压力，并将估计的压力提供给控制装置。