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公开(公告)号：US20170225942A1
公开(公告)日：2017-08-10
申请号：US15422508
申请日：2017-02-02
Applicant: Analog Devices Global
Inventor： Padraig Fitzgerald , Michael James Twohig
CPC classification number: B81B3/0051 , B81B2201/014 , B81B2203/0118 , B81B2203/0181 , B81C1/0015 , B81C2201/0109 , B81C2201/0197 , H01H59/0009 , H01H2059/0027 , H01H2059/0054
Abstract: Microelectromechanical systems (MEMS) switches are described. The MEMS switches can be actively opened and closed. The switch can include a beam coupled to an anchor on a substrate by one or more hinges. The beam, the hinges and the anchor may be made of the same material in some configurations. The switch can include electrodes, disposed on a surface of the substrate, for electrically controlling the orientation of the beam. The hinges may be thinner than the beam, resulting in the hinges being more flexible than the beam. In some configurations, the hinges are located within an opening in the beam. The hinges may extend in the same direction of the axis of rotation of the beam and/or in a direction perpendicular to the axis of rotation of the beam.
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公开(公告)号：US11228310B2
公开(公告)日：2022-01-18
申请号：US17080785
申请日：2020-10-26
Applicant: Analog Devices Global Unlimited Company
Inventor： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Thomas Sheeran , Michael C. W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald , Mark Schirmer
Abstract: Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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公开(公告)号：US20210067160A1
公开(公告)日：2021-03-04
申请号：US17080785
申请日：2020-10-26
Applicant: Analog Devices Global Unlimited Company
Inventor： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Sheeran , Michael C.W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald , Mark Schirmer
Abstract: Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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公开(公告)号：US20190288686A1
公开(公告)日：2019-09-19
申请号：US16137640
申请日：2018-09-21
Applicant: Analog Devices Global Unlimited Company
Inventor： Ying Zhao , Alan O'Donnell , Michael James Twohig , Olly J. Kierse , James Thomas Sheeran , Michael C.W. Coln , Paul W. Stevens , Bruce A. Hecht , Padraig Fitzgerald Fitzgerald , Mark Schirmer
Abstract: Optically isolated micromachined (MEMS) switches and related methods are described. The optically isolated MEMS switches described herein may be used to provide isolation between electronic devices. For example, the optically isolated MEMS switches of the types described herein can enable the use of separate grounds between the receiving electronic device and the control circuitry. Isolation of high-voltage signals and high-voltage power supplies can be achieved by using an optical isolator and a MEMS switch, where the optical isolator controls the state of the MEMS switch. In some embodiments, utilizing optical isolators to provide high voltages, the need for electric high-voltage sources such as high-voltage power supplies and charge pumps may be removed, thus removing the cause of potential damage to the receiving electronic device. In one example, the optical isolator and the MEMS switch may be co-packaged on the same substrate.
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