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公开(公告)号：US12009191B2
公开(公告)日：2024-06-11
申请号：US16946263
申请日：2020-06-12
Applicant: Applied Materials, Inc.
Inventor： Patrick Tae , Blake W. Erickson , Zhaozhao Zhu , Michael David Willwerth , Barry Paul Craver
CPC classification number: H01J37/32972 , G01B11/0625 , G01B11/0683 , H01J37/32467 , H01J37/32862 , H01J37/32963 , H01L22/26 , H01J2237/24585 , H01J2237/332
Abstract: A system includes a transparent crystal, at least part of which is embedded within a wall and a liner of a processing chamber. The transparent crystal has a proximal end and a distal end, the distal end having a distal surface exposed to an interior of the processing chamber. A transparent thin film is deposited on the distal surface and has chemical properties substantially matching those of the liner. A light coupling device is to: transmit light, from a light source, through the proximal end of the transparent crystal, and focus, into a spectrometer, light received reflected back from a combination of the distal surface, a surface of the transparent thin film, and a surface of a process film layer deposited on the transparent thin film. The spectrometer is to detect a first spectrum within the focused light that is representative of the process film layer.
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2.发明公开公开(公告)号：US20240290592A1
公开(公告)日：2024-08-29
申请号：US18655748
申请日：2024-05-06
Applicant: Applied Materials, Inc.
Inventor： Patrick Tae , Blake W. Erickson , Zhaozhao Zhu , Michael David Willwerth , Barry Paul Craver
CPC classification number: H01J37/32972 , G01B11/0625 , G01B11/0683 , H01J37/32467 , H01J37/32862 , H01J37/32963 , H01L22/26 , H01J2237/24585 , H01J2237/332
Abstract: A method includes embedding at least part of a transparent crystal within a wall and a liner of a processing chamber, depositing a transparent thin film on a surface of the transparent crystal that is exposed to an interior of the processing chamber and depositing a process film layer on the transparent thin film. The method includes receiving light reflected back from a surface of the transparent thin film and a surface of the process film layer and detecting, by a spectrometer within the received light, a first spectrum that is representative of the process film layer. The method includes calculating, by a processing device coupled to the spectrometer, a process drift of the processing chamber based at least in part on the first spectrum.
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公开(公告)号：US20210391157A1
公开(公告)日：2021-12-16
申请号：US16946263
申请日：2020-06-12
Applicant: Applied Materials, Inc.
Inventor： Patrick Tae , Blake W. Erickson , Zhaozhao Zhu , Michael David Willwerth , Barry Paul Craver
Abstract: A system includes a transparent crystal, at least part of which is embedded within a wall and a liner of a processing chamber. The transparent crystal has a proximal end and a distal end, the distal end having a distal surface exposed to an interior of the processing chamber. A transparent thin film is deposited on the distal surface and has chemical properties substantially matching those of the liner. A light coupling device is to: transmit light, from a light source, through the proximal end of the transparent crystal, and focus, into a spectrometer, light received reflected back from a combination of the distal surface, a surface of the transparent thin film, and a surface of a process film layer deposited on the transparent thin film. The spectrometer is to detect a first spectrum within the focused light that is representative of the process film layer.
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