公开(公告)号：US20230078567A1

公开(公告)日：2023-03-16

申请号：US17447745

申请日：2021-09-15

申请人： Applied Materials, Inc.

发明人： Patrick Tae ,  Zhaozhao Zhu ,  Blake W. Erickson ,  Chunlei Zhang

IPC分类号： G01N21/55

摘要： Implementations disclosed describe a system including a light source, an optical sensor, and a processing device. The light source directs, during a first time, a probe light into a processing chamber through a window. The light source ceases, during a second time, directing the probe light into the processing chamber through the window. The optical sensor detects, during the first time, a first intensity of a first light. The first light includes a portion of the probe light reflected from the window and a light transmitted from an environment of the processing chamber through the window. The optical sensor detects, during the second time, a second intensity of a second light. The second light includes the light transmitted from the environment of the processing chamber through the window. The processing device determines, using the first intensity and the second intensity, a transmission coefficient of the window.

公开(公告)号：US11781214B2

公开(公告)日：2023-10-10

申请号：US16526268

申请日：2019-07-30

申请人： APPLIED MATERIALS, INC.

发明人： Patrick Tae ,  Yaoling Pan ,  Leonard M. Tedeschi

IPC分类号： C23C14/52 ,  G01N27/22 ,  C23C16/52 ,  H01J37/32 ,  C23C14/54

CPC分类号： C23C14/52 ,  C23C14/545 ,  C23C16/52 ,  G01N27/22 ,  H01J37/32935

摘要： Methods and apparatus for a processing chamber are provided herein. The apparatus includes, for example, an inner volume defined in the processing chamber; a first sensor assembly coupled to a surface located in the inner volume of the processing chamber and including a first electrode configuration configured to measure an electrical characteristic associated with a film deposited within the inner volume of the processing chamber; and a second sensor assembly coupled to the surface located in the inner volume of the processing chamber in relative proximity to the first sensor assembly and including a second electrode configuration, different from the first electrode configuration, configured to measure the same electrical characteristic as the first electrode configuration.

公开(公告)号：US11708635B2

公开(公告)日：2023-07-25

申请号：US16946264

申请日：2020-06-12

申请人： Applied Materials, Inc.

发明人： Patrick Tae

IPC分类号： H01L21/67 ,  H01J37/32 ,  C23C16/44 ,  G01N21/55 ,  C23C16/455

CPC分类号： C23C16/4405 ,  C23C16/45536 ,  G01N21/55 ,  H01J37/32862 ,  H01J37/32972 ,  H01L21/67017

摘要： A system includes a reflector attached to a liner of a processing chamber. A light coupling device is to transmit light, from a light source, through a window of the processing chamber directed at the reflector. The light coupling device focuses, into a spectrometer, light received reflected back from the reflector along an optical path through the processing chamber and the window. The spectrometer detects, within the focused light, a first spectrum representative of a deposited film layer on the reflector using reflectometry. An alignment device aligns, in two dimensions, the light coupling device with the reflector until maximization of the focused light received by the light coupling device.

公开(公告)号：US11284018B1

公开(公告)日：2022-03-22

申请号：US17021992

申请日：2020-09-15

申请人： Applied Materials, Inc.

发明人： Upendra Ummethala ,  Philip Kraus ,  Keith Berding ,  Blake Erickson ,  Patrick Tae ,  Devendra Channappa Holeyannavar ,  Shivaraj Manjunath Nara ,  Anandakumar Parameshwarappa ,  Sivasankar Nagarajan ,  Dhirendra Kumar

IPC分类号： H04N5/247 ,  H01L21/67 ,  H04N5/225

摘要： Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

公开(公告)号：US12000041B2

公开(公告)日：2024-06-04

申请号：US18203853

申请日：2023-05-31

申请人： Applied Materials, Inc.

发明人： Patrick Tae

IPC分类号： H01J37/32 ,  C23C16/44 ,  C23C16/455 ,  G01N21/55 ,  H01L21/67

CPC分类号： C23C16/4405 ,  C23C16/45536 ,  G01N21/55 ,  H01J37/32862 ,  H01J37/32972 ,  H01L21/67017

摘要： A method includes receiving light, by a light coupling device and along an optical path, reflected back from a reflector mounted on a liner of a processing chamber. The method further includes detecting, by a spectrometer within the received light, a first spectrum representative of a deposited film layer on the reflector. The method further includes aligning, using an alignment device, the light coupling device in two dimensions with reference to the reflector along the optical path until maximization of the light received by the light coupling device.

公开(公告)号：US20230345137A1

公开(公告)日：2023-10-26

申请号：US18214417

申请日：2023-06-26

申请人： Applied Materials, Inc.

发明人： Upendra Ummethala ,  Philip Kraus ,  Keith Berding ,  Blake Erickson ,  Patrick Tae ,  Devendra Channappa Holeyannavar ,  Shivaraj Manjunath Nara ,  Anandakumar Parameshwarappa ,  Sivasankar Nagarajan ,  Dhirendra Kumar

IPC分类号： H01L21/67 ,  H04N23/90 ,  H04N23/56

CPC分类号： H04N23/90 ,  H01L21/67276 ,  H04N23/56 ,  H04N23/555

摘要： Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

公开(公告)号：US11736818B2

公开(公告)日：2023-08-22

申请号：US17668363

申请日：2022-02-09

申请人： Applied Materials, Inc.

发明人： Upendra Ummethala ,  Philip Kraus ,  Keith Berding ,  Blake Erickson ,  Patrick Tae ,  Devendra Channappa Holeyannavar ,  Shivaraj Manjunath Nara ,  Anandakumar Parameshwarappa ,  Sivasankar Nagarajan ,  Dhirendra Kumar

IPC分类号： H04N23/90 ,  H01L21/67 ,  H04N23/56 ,  H04N23/50

CPC分类号： H04N23/90 ,  H01L21/67276 ,  H04N23/56 ,  H04N23/555

摘要： Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

公开(公告)号：US20220272278A1

公开(公告)日：2022-08-25

申请号：US17668363

申请日：2022-02-09

申请人： Applied Materials, Inc.

发明人： Upendra Ummethala ,  Philip Kraus ,  Keith Berding ,  Blake Erickson ,  Patrick Tae ,  Devendra Channappa Holeyannavar ,  Shivaral Manjunath Nara ,  Anandakumar Parameshwarappa ,  Sivasankar Nagarajan ,  Dhirendra Kumar

IPC分类号： H04N5/247 ,  H01L21/67 ,  H04N5/225

摘要： Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

公开(公告)号：US12123090B2

公开(公告)日：2024-10-22

申请号：US18368285

申请日：2023-09-14

申请人： Applied Materials, Inc.

发明人： Patrick Tae ,  Yaoling Pan ,  Leonard M Tedeschi

IPC分类号： C23C14/52 ,  C23C14/54 ,  C23C16/52 ,  G01N27/22 ,  H01J37/32

CPC分类号： C23C14/52 ,  C23C14/545 ,  C23C16/52 ,  G01N27/22 ,  H01J37/32935

摘要： Methods and apparatus for a processing chamber are provided herein. The apparatus includes, for example, an inner volume defined in the processing chamber; a first sensor assembly coupled to a surface located in the inner volume of the processing chamber and including a first electrode configuration configured to measure an electrical characteristic associated with a film deposited within the inner volume of the processing chamber; and a second sensor assembly coupled to the surface located in the inner volume of the processing chamber in relative proximity to the first sensor assembly and including a second electrode configuration, different from the first electrode configuration, configured to measure the same electrical characteristic as the first electrode configuration.

公开(公告)号：US12009191B2

公开(公告)日：2024-06-11

申请号：US16946263

申请日：2020-06-12

申请人： Applied Materials, Inc.

发明人： Patrick Tae ,  Blake W. Erickson ,  Zhaozhao Zhu ,  Michael David Willwerth ,  Barry Paul Craver

IPC分类号： H01J37/32 ,  G01B11/06 ,  H01L21/66

CPC分类号： H01J37/32972 ,  G01B11/0625 ,  G01B11/0683 ,  H01J37/32467 ,  H01J37/32862 ,  H01J37/32963 ,  H01L22/26 ,  H01J2237/24585 ,  H01J2237/332

摘要： A system includes a transparent crystal, at least part of which is embedded within a wall and a liner of a processing chamber. The transparent crystal has a proximal end and a distal end, the distal end having a distal surface exposed to an interior of the processing chamber. A transparent thin film is deposited on the distal surface and has chemical properties substantially matching those of the liner. A light coupling device is to: transmit light, from a light source, through the proximal end of the transparent crystal, and focus, into a spectrometer, light received reflected back from a combination of the distal surface, a surface of the transparent thin film, and a surface of a process film layer deposited on the transparent thin film. The spectrometer is to detect a first spectrum within the focused light that is representative of the process film layer.