公开(公告)号：US20230413446A1

公开(公告)日：2023-12-21

申请号：US18242629

申请日：2023-09-06

申请人： Applied Materials, Inc.

发明人： Phillip A. Criminale ,  Zhiqiang Guo ,  Andrew Myles ,  Martin Perez-Guzman ,  Nelson Joseph Gaspard ,  Timothy Joseph Franklin ,  Michael A. Stearns

IPC分类号： H05K1/18 ,  H01L21/66

CPC分类号： H05K1/183 ,  H01L22/34 ,  H05K2201/09027 ,  H05K2201/10037 ,  H05K2201/10098 ,  H05K2201/10151 ,  H05K2201/10159 ,  H01L21/68742

摘要： A method includes causing, by a computing system comprising at least one processing device, a diagnostic disc placed within a processing chamber to generate sensor data of at least one component of the processing chamber using a set of non-contact sensors of the diagnostic disc, receiving, by the computing system, the sensor data from the diagnostic disc via a wireless connection established between the computing system and the diagnostic disc, determining, by the computing system based on the sensor data, whether at least one of alignment concentricity is skewed with respect to the at least one component, and in response to determining that at least one of alignment or concentricity is skewed with respect to the at least one component, initiating, by the computing system, correction of at least one of alignment or concentricity of the at least one component.