公开(公告)号：US11828714B2

公开(公告)日：2023-11-28

申请号：US17039694

申请日：2020-09-30

Applicant: Applied Materials Israel Ltd.

Inventor： Bobin Mathew Skaria ,  Anirban Ghosh ,  Nitin Singh Malik ,  Shay Attal

IPC: G01N21/95 ,  H01L21/66 ,  G01N21/88

CPC classification number: G01N21/9505 ,  G01N21/8851 ,  H01L22/12 ,  G01N2021/8854 ,  G01N2021/8887

Abstract: There is provided a system and a method comprising obtaining a sequence of a plurality of frames of an area of a specimen, wherein at least one frame of the sequence is transformed with respect to another frame, obtaining a reference frame based at least on a first frame of the sequence, determining, based on the reference frame, a reference pattern, wherein the reference pattern is informative of a structural feature of the specimen in the area, for a given frame of the sequence, determining, based on the given frame, a pattern informative of said structural feature in the area, determining data Dshrinkage informative of an amplitude of a spatial transformation between the reference pattern and the pattern, generating a corrected frame based on said pattern and Dshrinkage and generating an image of the area.