公开(公告)号：US11995848B2

公开(公告)日：2024-05-28

申请号：US17209086

申请日：2021-03-22

Applicant: Applied Materials Israel Ltd.

Inventor： David Uliel ,  Yan Avniel ,  Bobin Mathew Skaria ,  Oz Fox-Kahana ,  Gal Daniel Gutterman ,  Atai Baldinger ,  Murad Muslimany ,  Erez Lidor

IPC: G06K9/00 ,  G06F18/22 ,  G06T5/50 ,  G06T7/00 ,  G06T7/30 ,  H01J37/26

CPC classification number: G06T7/30 ,  G06F18/22 ,  G06T5/50 ,  G06T7/001 ,  H01J37/261 ,  G06T2207/20221 ,  G06T2207/30148 ,  H01J2237/221

Abstract: There is provided a system and method of examination of a semiconductor specimen, comprising: obtaining a sequence of frames of an area of the specimen acquired by an electron beam tool configured to scan the area from a plurality of directions, the sequence comprising a plurality of sets of frames each acquired from a respective direction; and registering the plurality of sets of frames and generating an image of the specimen based on result of the registration, comprising: performing, for each direction, a first registration among the set of frames acquired therefrom, and combining the registered set of frames to generate a first composite frame, giving rise to a plurality of first composite frames respectively corresponding to the plurality of directions; and performing a second registration among the plurality of first composite frames, and combining the registered plurality of first composite frames to generate the image of the specimen.

公开(公告)号：US11828714B2

公开(公告)日：2023-11-28

申请号：US17039694

申请日：2020-09-30

Applicant: Applied Materials Israel Ltd.

Inventor： Bobin Mathew Skaria ,  Anirban Ghosh ,  Nitin Singh Malik ,  Shay Attal

IPC: G01N21/95 ,  H01L21/66 ,  G01N21/88

CPC classification number: G01N21/9505 ,  G01N21/8851 ,  H01L22/12 ,  G01N2021/8854 ,  G01N2021/8887

Abstract: There is provided a system and a method comprising obtaining a sequence of a plurality of frames of an area of a specimen, wherein at least one frame of the sequence is transformed with respect to another frame, obtaining a reference frame based at least on a first frame of the sequence, determining, based on the reference frame, a reference pattern, wherein the reference pattern is informative of a structural feature of the specimen in the area, for a given frame of the sequence, determining, based on the given frame, a pattern informative of said structural feature in the area, determining data Dshrinkage informative of an amplitude of a spatial transformation between the reference pattern and the pattern, generating a corrected frame based on said pattern and Dshrinkage and generating an image of the area.