公开(公告)号：US20040159775A1

公开(公告)日：2004-08-19

申请号：US10781523

申请日：2004-02-18

Applicant: BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC

Inventor： Mani Sundaram ,  Axel R. Reisinger

IPC: H01L031/0328 ,  H01L031/072 ,  H01L031/109

CPC classification number: H01L31/035236 ,  B82Y20/00 ,  H01L27/1462 ,  H01L27/14625 ,  H01L27/14647 ,  H01L27/14667 ,  H01L27/14689 ,  H01L31/02161 ,  H01L31/02327 ,  H01L31/03046 ,  Y02E10/544

Abstract: A QWIP structure is disclosed that is configured with enhanced optical coupling to improve absorption capability and efficiency. A waffle-type light-coupling grating having a pattern of etched holes operates to improve absorption by preventing photons from bouncing out of the detector sensing areas. A post-type light coupling grating can also be used. Parameters of the grating, including its orientation, pitch, and etch depth, can be adjusted to optimize specific color detection. The grating can include a hybrid metal layer including both ohmic and reflective qualities to further improve quantum and conversion efficiency. A nullphoton-in-a-boxnull configuration is also disclosed, where sides of the QWIP sensing areas are coated with reflective metal to further inhibit the escaping of photons. The material design and number of quantum wells per QWIP can be selected so as to exploit the avalanche effect, thereby increasing device responsivity.

Abstract translation: 公开了一种QWIP结构，其配置有增强的光耦合以改善吸收能力和效率。 具有蚀刻孔的图案的华夫饼型光耦合光栅通过防止光子从检测器感测区域跳出而改善吸收。 还可以使用后型光耦合光栅。 可以调整光栅的参数，包括其取向，间距和蚀刻深度，以优化特定的颜色检测。 光栅可以包括包括欧姆和反射特性的混合金属层，以进一步提高量子和转换效率。 还公开了一种“光子盒”配置，其中QWIP感测区域的侧面涂覆有反射金属以进一步抑制光子逸出。 可以选择QWIP的量子阱的材料设计和数量，以利用雪崩效应，从而提高器件响应度。