公开(公告)号：US3914465A

公开(公告)日：1975-10-21

申请号：US29212672

申请日：1972-09-25

Applicant: BELL TELEPHONE LABOR INC

Inventor： DYMENT JOHN CAMERON ,  SCHWARTZ BERTRAM

IPC: H01L21/306 ,  H01L21/316 ,  H01S5/028 ,  H01S3/18 ,  H01S3/19

CPC classification number: H01S5/028 ,  H01L21/30612 ,  H01L21/31654 ,  Y10S148/017 ,  Y10S148/056 ,  Y10S148/118

Abstract: A method for protecting the surface of GaAs junction lasers, in particular the cleaved mirror surfaces of such devices. A native oxide is first grown on the surface of the device by immersing the device in an aqueous H2O2 solution wherein the pH is 1.5-3.5. The device is then immersed in an aqueous H2O2 solution which has been adjusted to a pH of 6-8 by a suitable hydroxide. This double oxidation technique provides substantial protection against the deleterious effects of water on the mirror surfaces.

Abstract translation: 一种用于保护GaAs结激光器表面的方法，特别是这种器件的切割镜面。 首先通过将该装置浸入pH为1.5-3.5的H 2 O 2水溶液中，在该装置的表面上生长天然氧化物。 然后将该装置浸入H 2 O 2水溶液中，该水溶液通过合适的氢氧化物调节至pH为6-8。 这种双重氧化技术提供了大量的保护，防止水对镜面的有害影响。