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1.发明申请Method and system for operating capacitive membrane ultrasonic transducers 审中-公开用于操作电容式膜超声波换能器的方法和系统公开(公告)号：US20050219953A1
公开(公告)日：2005-10-06
申请号：US11078795
申请日：2005-03-10
CPC分类号： B06B1/0292
摘要： A capacitive membrane ultrasonic transducer system and method of operation is described. The transducers are operated in the collapsed mode. In this mode the membrane is first subjected to a voltage higher than the collapse voltage, therefore initially collapsing the membrane onto the substrate. Then, a bias voltage is applied having an amplitude between the collapse and snapback voltages. At this bias voltage, the center of the membrane still contacts the substrate. By applying driving AC voltage or voltage pulses harmonic membrane motion is obtained in a circular ring concentric to the center. In this regime, between collapse and snapback, the cMUT has a higher eletromechanical coupling efficiency than it has when it is operated in the conventional pre-collapse mode.
摘要翻译： 描述了一种电容式膜超声换能器系统及其操作方法。 换能器在折叠模式下运行。 在该模式中，膜首先经受高于塌陷电压的电压，因此最初将膜塌陷到基底上。 然后，施加具有在崩溃和回弹电压之间的幅度的偏置电压。 在该偏置电压下，膜的中心仍接触基板。 通过施加驱动AC电压或电压脉冲，在与中心同心的圆环中获得谐波膜运动。 在这种情况下，在崩溃和回弹之间，cMUT具有比在常规的预塌陷模式下操作时更高的电机耦合效率。
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2.发明申请公开(公告)号：US20050234342A1
公开(公告)日：2005-10-20
申请号：US11094874
申请日：2005-03-30
申请人： Baris Bayram , Omer Oralkan , Butrus Khuri-Yakub
发明人： Baris Bayram , Omer Oralkan , Butrus Khuri-Yakub
CPC分类号： B06B1/0292 , G10K9/12
摘要： A novel operation regime for capacitive micromachined ultrasonic transducers (cMUTs). The collapse-snapback operation in which the center of the membrane makes intermittent contact with the substrate. This combines two distinct states of the membrane (in-collapse and out-of-collapse) to unleash unprecedented acoustic output pressures into the medium. The collapse-snapback operation utilizes a larger range of membrane defection profiles (both collapsed and released membrane profiles) and generates higher acoustic output pressures than the conventional operation. Collapse-snapback operation meets the extreme acoustic transmit pressure demands of the ultrasonic industry.
摘要翻译： 电容式微加工超声换能器（cMUT）的新颖操作方案。 折叠回击操作，其中膜的中心与衬底间歇接触。 这结合了膜的两种截然不同的状态（塌陷和失真），以释放出前所未有的声输出压力进入介质。 塌陷 - 回弹操作利用更大范围的膜缺陷曲线（两个折叠和释放的膜轮廓），并产生比常规操作更高的声输出压力。 塌陷 - 回弹操作满足超声波行业的极端声学传输压力要求。
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3.发明申请Method for Microfabrication of a Capacitive Micromachined Ultrasonic Transducer Comprising a Diamond Membrane and a Transducer Thereof 有权包含金刚石膜及其传感器的电容式微加工超声波传感器的微加工方法公开(公告)号：US20120256517A1
公开(公告)日：2012-10-11
申请号：US13083599
申请日：2011-04-11
申请人： Baris Bayram
发明人： Baris Bayram
CPC分类号： B81C1/00158 , B06B1/0292 , B81B2201/0292 , B81C2201/0125 , Y10T29/49005
摘要： This invention relates generally to capacitive micromachined ultrasonic transducers (CMUTs), particularly to those comprising diamond or diamond like carbon membranes and a method of microfabrication of such CMUTs, wherein the membrane of diamond or diamond like carbon is attached to the substrate by plasma-activated direct bonding of an interlayer of high temperature oxide (HTO).
摘要翻译： 本发明一般涉及电容微加工超声波换能器（CMUT），特别涉及包括金刚石或类似金刚石的碳膜的那些，以及这种CMUT的微细加工方法，其中金刚石或类似金刚石的碳膜通过等离子体激活 直接键合高温氧化物（HTO）的中间层。
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4.发明授权公开(公告)号：US08421170B2
公开(公告)日：2013-04-16
申请号：US13083599
申请日：2011-04-11
申请人： Baris Bayram
发明人： Baris Bayram
CPC分类号： B81C1/00158 , B06B1/0292 , B81B2201/0292 , B81C2201/0125 , Y10T29/49005
摘要： This invention relates generally to capacitive micromachined ultrasonic transducers (CMUTs), particularly to those comprising diamond or diamond like carbon membranes and a method of microfabrication of such CMUTs, wherein the membrane of diamond or diamond like carbon is attached to the substrate by plasma-activated direct bonding of an interlayer of high temperature oxide (HTO).
摘要翻译： 本发明一般涉及电容微加工超声波换能器（CMUT），特别涉及包括金刚石或类似金刚石的碳膜的那些，以及这种CMUT的微细加工方法，其中金刚石或类似金刚石的碳膜通过等离子体激活 直接键合高温氧化物（HTO）的中间层。
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5.发明授权公开(公告)号：US07274623B2
公开(公告)日：2007-09-25
申请号：US11094874
申请日：2005-03-30
CPC分类号： B06B1/0292 , G10K9/12
摘要： A novel operation regime for capacitive micromachined ultrasonic transducers (cMUTs). The collapse-snapback operation in which the center of the membrane makes intermittent contact with the substrate. This combines two distinct states of the membrane (in-collapse and out-of-collapse) to unleash unprecedented acoustic output pressures into the medium. The collapse-snapback operation utilizes a larger range of membrane defection profiles (both collapsed and released membrane profiles) and generates higher acoustic output pressures than the conventional operation. Collapse-snapback operation meets the extreme acoustic transmit pressure demands of the ultrasonic industry.
摘要翻译： 电容式微加工超声换能器（cMUT）的新颖操作方案。 折叠回击操作，其中膜的中心与衬底间歇接触。 这结合了膜的两种截然不同的状态（塌陷和失真），以释放出前所未有的声输出压力进入介质。 塌陷 - 回弹操作利用更大范围的膜缺陷曲线（两个折叠和释放的膜轮廓），并产生比常规操作更高的声输出压力。 塌陷 - 回弹操作满足超声波行业的极端声学传输压力要求。
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6.发明授权Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion 有权用于电容式微机械超声换能器的声学串扰降低公开(公告)号：US07745973B2
公开(公告)日：2010-06-29
申请号：US11789210
申请日：2007-04-23
IPC分类号： H01L41/08
CPC分类号： B06B1/0292
摘要： A reduced crosstalk capacitive micromachined ultrasonic transducer (CMUT) array is provided. The CMUT array has at least two CMUT array elements deposited on a substrate, at least one CMUT cell in the array element, a separation region between adjacent CMUT array elements, and a membrane formed in the separation region. The membrane reduces crosstalk between adjacent array elements, where the crosstalk is a dispersive guided mode of an ultrasonic signal from the CMUT propagating in a fluid-solid interface of the CMUT array. Each cell has an insulation layer deposited to the substrate. A cell membrane layer is deposited to the insulation layer, where the cell membrane layer has a vacuum gap therein. The cells further have an electrode layer deposited to a portion of the membrane layer, and a passivation layer deposited to the electrode layer, the cell membrane layer and to the insulation layer.
摘要翻译： 提供了减少的串扰电容微机械超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在衬底上的至少两个CMUT阵列元件，阵列元件中的至少一个CMUT单元，相邻CMUT阵列元件之间的分离区域和形成在分离区域中的膜。 膜减少相邻阵列元件之间的串扰，其中串扰是来自在CMUT阵列的流体 - 固体界面中传播的CMUT的超声信号的色散引导模式。 每个单元具有沉积到基板上的绝缘层。 细胞膜层沉积到绝缘层，其中细胞膜层在其中具有真空间隙。 电池还具有沉积到膜层的一部分的电极层和沉积到电极层，细胞膜层和绝缘层的钝化层。
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7.发明申请Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion 有权用于电容式微机械超声换能器的声学串扰降低公开(公告)号：US20080259725A1
公开(公告)日：2008-10-23
申请号：US11789210
申请日：2007-04-23
CPC分类号： B06B1/0292
摘要： A reduced crosstalk capacitive micromachined ultrasonic transducer (CMUT) array is provided. The CMUT array has at least two CMUT array elements deposited on a substrate, at least one CMUT cell in the array element, a separation region between adjacent CMUT array elements, and a membrane formed in the separation region. The membrane reduces crosstalk between adjacent array elements, where the crosstalk is a dispersive guided mode of an ultrasonic signal from the CMUT propagating in a fluid-solid interface of the CMUT array. Each cell has an insulation layer deposited to the substrate. A cell membrane layer is deposited to the insulation layer, where the cell membrane layer has a vacuum gap therein. The cells further have an electrode layer deposited to a portion of the membrane layer, and a passivation layer deposited to the electrode layer, the cell membrane layer and to the insulation layer.
摘要翻译： 提供了减少的串扰电容微机械超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在衬底上的至少两个CMUT阵列元件，阵列元件中的至少一个CMUT单元，相邻CMUT阵列元件之间的分离区域和形成在分离区域中的膜。 膜减少相邻阵列元件之间的串扰，其中串扰是来自在CMUT阵列的流体 - 固体界面中传播的CMUT的超声信号的色散引导模式。 每个单元具有沉积到基板上的绝缘层。 细胞膜层沉积到绝缘层，其中细胞膜层在其中具有真空间隙。 电池还具有沉积到膜层的一部分的电极层和沉积到电极层，细胞膜层和绝缘层的钝化层。
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