公开(公告)号：US20230194348A1

公开(公告)日：2023-06-22

申请号：US17915388

申请日：2020-12-16

Applicant: Beijing RSLaser Opto-Electronics Technology Co., Ltd.

Inventor： Guangyi LIU ,  Rui JIANG ,  Xiaoquan HAN ,  Jiangshan ZHAO ,  Pengfei SHA ,  Qingqing YIN ,  Hua ZHANG ,  Xinyue HU

IPC: G01J3/45 ,  G01J3/02

CPC classification number: G01J3/45 ,  G01J3/021 ,  G01J2003/451

Abstract: Provided are a device (4) and a method for online measuring a spectrum for a laser device. The device (4) for online measuring a spectrum for a laser device includes: a first optical path assembly (G1) and a second optical path assembly (G2), and the second optical path assembly (G2) and the first optical path assembly (G1) constitute a measurement optical path. The second optical path assembly (G2) includes: an FP etalon (15) and a grating (18). The homogenized laser beam passes through the FP etalon (15) to generate an interference fringe. The grating (18) is arranged after the FP etalon (15), or is arranged before the FP etalon (15) in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon (15). A high precision measurement in a wide range for a central wavelength of a laser beam and an accurate measurement for spectral parameters of a corresponding FWHM and E95 are achieved through an arrangement of the FP etalon and the grating “in series” in the measurement optical path. There is no moving element in the measurement optical path, the structure is simple and compact, the measurement precision is high, and the stability is high. The corresponding measurement algorithm is simple and efficient, and has an extremely high scientific research or commercial application value.