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公开(公告)号：US20230194348A1
公开(公告)日：2023-06-22
申请号：US17915388
申请日：2020-12-16
Inventor： Guangyi LIU , Rui JIANG , Xiaoquan HAN , Jiangshan ZHAO , Pengfei SHA , Qingqing YIN , Hua ZHANG , Xinyue HU
CPC classification number: G01J3/45 , G01J3/021 , G01J2003/451
Abstract: Provided are a device (4) and a method for online measuring a spectrum for a laser device. The device (4) for online measuring a spectrum for a laser device includes: a first optical path assembly (G1) and a second optical path assembly (G2), and the second optical path assembly (G2) and the first optical path assembly (G1) constitute a measurement optical path. The second optical path assembly (G2) includes: an FP etalon (15) and a grating (18). The homogenized laser beam passes through the FP etalon (15) to generate an interference fringe. The grating (18) is arranged after the FP etalon (15), or is arranged before the FP etalon (15) in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon (15). A high precision measurement in a wide range for a central wavelength of a laser beam and an accurate measurement for spectral parameters of a corresponding FWHM and E95 are achieved through an arrangement of the FP etalon and the grating “in series” in the measurement optical path. There is no moving element in the measurement optical path, the structure is simple and compact, the measurement precision is high, and the stability is high. The corresponding measurement algorithm is simple and efficient, and has an extremely high scientific research or commercial application value.
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公开(公告)号：US20230409784A1
公开(公告)日：2023-12-21
申请号：US18459424
申请日：2023-09-01
Inventor： Zebin FENG , Sai LIANG , Xiangyu XU , Rui JIANG , Guangyi LIU , Bin LIU , Pei CAO
IPC: G06F30/27
CPC classification number: G06F30/27
Abstract: Disclosed in the present invention are an excimer laser energy model identification method and apparatus. The method comprises the following steps: establishing a gated recurrent network for excimer laser energy model identification; within a plurality of preset time periods, setting energy collection conditions in a single laser pulse mode, and collecting a training data set for excimer laser energy model identification; and using the training data set to train the established gated recurrent network, and when a training termination condition is satisfied, ending the training and obtaining an excimer laser energy model. By means of the method provided by the present invention, the maximum error between a pulse energy generated by the identified excimer laser energy model and an actual pulse energy is less than 1.5%, and thus, a simulation requirement of excimer laser energy characteristic control can be met.
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公开(公告)号：US20230144290A1
公开(公告)日：2023-05-11
申请号：US17915434
申请日：2020-12-11
Inventor： Guangyi LIU , Rui JIANG , Xiaoquan HAN , Jiangshan ZHAO , Pengfei SHA , Qingqing YIN , Hua ZHANG
IPC: G01J9/02
CPC classification number: G01J9/0246 , G01J2009/0234 , G01J2009/0257
Abstract: According to the present disclosure, there is provided a device (2) and a method for measuring a wavelength for a laser device. The device (2) for measuring a wavelength for a laser device includes: a first optical path assembly and a second optical path assembly. The first optical path assembly and the second optical path assembly constitute a laser wavelength measurement optical path. The second optical path assembly includes: an FP etalon assembly (11) and an optical classifier (13). The homogenized laser beam passes through the FP etalon assembly (11) to generate an interference fringe. The optical classifier (13) is arranged after the FP etalon assembly (11) in the laser wavelength measurement optical path, and configured to deflect the laser beam passing through the FP etalon assembly (11). The FP etalon assembly (11) allows two FP etalons (FP1, FP2) to share the same optical path for an interference imaging, and therefore a compact structure having a small volume, a simple design, and a high stability are achieved. In cooperation with the optical classifier (13), a precise measurement for a laser wavelength may be achieved, and at the same time a wavelength measurement range is large. It is suitable for an online measurement for a laser wavelength and a corresponding closed-loop control feedback.
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公开(公告)号：US20240235144A1
公开(公告)日：2024-07-11
申请号：US18603253
申请日：2024-03-13
Inventor： Jinsong WU , Bin LIU , Xiangyu XU , Guangyi LIU , Rui JIANG , Wenbin CHEN
CPC classification number: H01S3/0346 , H01S3/036
Abstract: A dustproof structure for a laser output window of a laser includes a discharge chamber, a gas purifier, a dust prevention pipeline, and a fan. A cavity is provided between the laser output window and a slit. The dust prevention pipeline includes a gas inlet end connected to the gas purifier, a middle part passing through the cavity, and a gas outlet end connected to the fan. At least a portion of a working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity. The fan guides the working gas so as to increase a flow rate of the gas passing through the cavity, thereby strengthening the blowing of the clean gas on the laser output window and effectively preventing dust particles in the working gas from approaching and contaminating the laser output window.
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