Interferometer movable mirror position measurement apparatus and fourier transform infrared spectroscopy

    公开(公告)号:US11860037B2

    公开(公告)日:2024-01-02

    申请号:US17269296

    申请日:2018-09-03

    CPC classification number: G01J3/45 G01B9/02044 G01B11/14

    Abstract: An interferometer movable mirror position measurement apparatus for determining a position of a movable mirror of an interferometer. The interferometer movable mirror position measurement apparatus including: a laser light source; a phase separation optical system configured to make first light and second light separately detected; a signal conversion unit configured to detect the first light and the second light in synchronization with a position of a movable mirror to generate a first sinusoidal wave signal and a second sinusoidal wave signal, respectively; a phase calculation unit configured to perform normalization and phase difference correction on each of the first sinusoidal wave signal and the second sinusoidal wave signal, and then calculate a phase of the first sinusoidal wave signal or the second sinusoidal wave signal at each time point; and a movable mirror position determination unit configured to determine a position of the movable mirror at a predetermined time point.

    Spectrum measurement method and spectrum measurement device

    公开(公告)号:US11815399B2

    公开(公告)日:2023-11-14

    申请号:US17653645

    申请日:2022-03-05

    Inventor: Akira Takada

    CPC classification number: G01J3/45 G01J3/021 G01J3/0208

    Abstract: A wavelength-swept light source is configured to generate light to be measured that is wavelength-swept coherent light with a wavelength periodically changed. The light to be measured is separated into a measurement section and a reference section that have different optical path lengths, and is then coupled in an interference section to generate interfering light. An analyzer performs a Fourier transform of interference signals of the interfering light, and acquires an actual measured noise floor value for each of the optical path length differences based on a point spread function. An estimated coherence time is determined so that an actual measured amplitude value of the noise floor value and a calculated amplitude value coincide with each other. Linewidth of the light emitted from the coherent light source is measured based on the estimated coherence time.

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