摘要:
The present invention provides methods and apparatus combining a pressure vessel and a centrifugal pump to accurately and efficiently control pressure and flow rate of liquid in a liquid dispense system. The present invention particularly relates to the accurate and efficient control of pressure and flow rate of liquids, such as high purity chemicals or slurries used in semiconductor manufacturing processes.
摘要:
An improved bulk fluid distribution system for controlling the pressure of a fluid in a supply line to a semiconductor manufacturing process. The distribution system includes a pump-based engine with either a pressure vessel or a pulse dampener. In the pump-pressure vessel embodiment, a controller monitors the pressure of the fluid in the supply line and adjusts the dispense pressure of the vessel. In the pump-pulse dampener embodiment, the controller monitors the pressure of the fluid in the supply line and adjusts the flow rate of the pump to maintain the pressure in the supply line at a predetermined setpoint.
摘要:
An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.
摘要:
Methods and apparatus for soliciting, tracking, aggregating and reporting popular and group-specific opinion via the Internet are described. In various embodiments, editors and Internet users utilize a poll module creation tool to create individual graphical polling modules for public or private distribution. Individual polling modules can be then be posted by users to third-party Web sites, personal Web pages and emails, as well as aggregated on a poll aggregation Web site, providing consumers a consolidated view, and searchable database, of popular opinion on a variety of topics.
摘要:
Methods and apparatus for providing content and services to an Internet-enabled device in synchronization with media content presented on a television, radio or other separate device are described. In various embodiments, information suitable for identifying the media content being presented on a television or radio is detected by an audio or video receiver such as a microphone, video camera or optical receiver built into or connected to a PC or laptop. Corresponding content is then fetched from Internet servers or local memory or storage and displayed on the PC or laptop. Also, a program module-based framework that provides for the delivery of such media-coordinated content across multiple programs and advertisements and multiple content providers is described.
摘要:
An improved bulk fluid distribution for supplying process fluids to semiconductor process tools. The improved system having an alternating pressure vessel engine substantially eliminates pressure fluctuations in the bulk fluid supply line due to head losses from the changing weight of the fluid in the dispensing vessels. The system also enables flexible control of the flow conditions of the fluid in the fluid supply line.