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公开(公告)号：US07716991B2
公开(公告)日：2010-05-18
申请号：US12192594
申请日：2008-08-15
IPC分类号： G01L11/00
CPC分类号： G01L11/06
摘要： The present invention relates to an apparatus for measuring pressure inside a predetermined vessel based on the principle that the transmitting efficiency of ultrasonic waves is changed by acoustic impedance variation according to an internal pressure. The apparatus includes an ultrasound exciting unit 20 disposed inside the vessel 10 and generating predetermined ultrasonic waves, an ultrasound receiving unit 30 disposed inside the vessel 10 and placed on the same axis line as that of the ultrasound exciting unit 20, a control unit 70 for controlling a frequency and a waveform of the excitation signal transmitted into the ultrasound exciting unit 20, and a pressure measuring unit 80 for measuring an internal pressure of the vessel 10 based on an ultrasonic signal received by the ultrasound receiving unit 30 and the excitation signal transmitted into the ultrasound exciting unit 20.
摘要翻译： 本发明涉及一种用于根据内部压力的声阻抗变化来改变超声波的发射效率的原理来测量预定容器内的压力的装置。 该装置包括设置在容器10内部并产生预定超声波的超声波激励单元20，设置在容器10内部并且放置在与超声波激励单元20相同的轴线上的超声波接收单元30，用于 控制发送到超声波激励单元20的激励信号的频率和波形;以及压力测量单元80，用于基于由超声波接收单元30接收的超声波信号和发送的激励信号来测量容器10的内部压力 进入超声波激发单元20。
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2.发明授权Apparatus for measuring pressure in a vessel using magnetostrictive acoustic transducer 失效用于使用磁致伸缩声换能器测量容器中的压力的装置公开(公告)号：US07735373B2
公开(公告)日：2010-06-15
申请号：US12190901
申请日：2008-08-13
申请人： Seung Hyun Cho , Bongyoung Ahn , Seung Soo Hong , Yong Hyeon Shin
发明人： Seung Hyun Cho , Bongyoung Ahn , Seung Soo Hong , Yong Hyeon Shin
IPC分类号： G01L9/10
摘要： The present invention relates to an apparatus for measuring pressure inside a vessel using a magnetostrictive acoustic transducer. The apparatus includes a magnetostrictive acoustic transducer, including an exciting coil unit wound on a first magnetization yoke disposed on an outer position of a vessel, a receiving coil unit wound on the first magnetization yoke, and a vibration unit disposed on an inner position of the vessel in which the first magnetization yoke is installed; a control unit for supplying a predetermined excitation current signal to the exciting coil unit; and a pressure measuring unit for measuring an internal pressure of the vessel based on an ultrasonic wave signal received by the receiving coil unit and an excitation current signal into the exciting coil unit.
摘要翻译： 本发明涉及使用磁致伸缩声学换能器来测量容器内的压力的装置。 该装置包括磁致伸缩声学换能器，其包括缠绕在设置在容器的外部位置上的第一磁轭上的励磁线圈单元，缠绕在第一磁化轭上的接收线圈单元和设置在第一磁轭上的内部位置的振动单元 装有第一磁轭的容器; 控制单元，用于向励磁线圈单元提供预定的激励电流信号; 以及压力测量单元，用于基于由接收线圈单元接收的超声波信号和激励电流信号来测量容器的内部压力到激励线圈单元中。
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3.发明申请Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison method 失效通过绝对方法和比较方法原位校准真空计的装置和方法公开(公告)号：US20070108671A1
公开(公告)日：2007-05-17
申请号：US11418733
申请日：2006-05-05
申请人： Seung Soo Hong , Yong Hyeon Shin , Kwang Hwa Chung , In Tae Lim
发明人： Seung Soo Hong , Yong Hyeon Shin , Kwang Hwa Chung , In Tae Lim
CPC分类号： G01L27/005 , C21D11/00
摘要： Disclosed therein is apparatus and method for in-situ calibration of a vacuum gauge by absolute method and comparison method, which can carry out absolute calibration using a static type standard for measuring pressures of vacuum chambers by expanding and moving gas to the vacuum chambers of different volumes in order and comparison calibration of vacuum gauges in an in-situ state without movement of the vacuum gauges according to a method for controlling gas flow through an orifice using a calibrated standard vacuum gauge. The present invention includes a technology for combining an absolute calibration of a standard vacuum gauge by a static method and a comparative calibration of a vacuum gauge by a method for controlling a gas flow through an orifice, technologies for generating and calibrating standard pressure from a low vacuum to a high vacuum, and a technology of comparative calibration of the vacuum gauge by a method for stabilizing the gas flow through the orifice. So, the absolute calibration and the comparative calibration of the vacuum gauges which have been separately carried out by different apparatuses till now can be carried out by just one apparatus, whereby economical efficiency and convenience in calibration of vacuum gauges are maximized.
摘要翻译： 其中公开了一种用于通过绝对方法和比较方法原位校准真空计的装置和方法，其可以使用静态标准进行绝对校准，用于通过将气体扩展和移动到不同的真空室来测量真空室的压力 根据用于通过校准的标准真空计控制通过孔口的气体流量的方法，在原位状态下的真空计的体积以及真空计的比较校准，而不会移动真空计。 本发明包括通过静态方法对标准真空计的绝对校准和通过用于控制通过孔口的气体流量的方法的真空计的比较校准进行组合的技术，用于从低温产生和校准标准压力的技术 通过用于稳定通过孔的气体流量的方法，真空至真空的真空，以及真空计的比较校准技术。 因此，仅通过一个装置可以进行到目前为止由各种装置分别进行的真空计的绝对校准和比较校准，由此真空计的校准的经济性和便利性最大化。
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4.发明授权Apparatus for and method of measuring composition and pressure of the discharged gas from ion gauge using residual gas analyzer 失效使用残留气体分析仪测量离子计排出气体的组成和压力的装置和方法公开(公告)号：US07456633B2
公开(公告)日：2008-11-25
申请号：US11551708
申请日：2006-10-21
申请人： Seung Soo Hong , Kwang Hwa Chung , Yong Hyeon Shin
发明人： Seung Soo Hong , Kwang Hwa Chung , Yong Hyeon Shin
CPC分类号： G01L21/34
摘要： Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.
摘要翻译： 本文公开了一种通过使用残留气体分析仪测量来自离子计的排出气体的组成和压力的装置和方法。 在这方面，通过在其上形成有孔口230的隔板235，设置有分压成压力容器210和排出容器220的真空容器200。 安装在真空容器200的压力容器210侧的用于在真空形成时排出气体的离子计100; 安装在真空容器200的压力容器210侧的残留气体分析器240，用于测量残余气体的组成和压力; 泵装置设置在真空容器200的排放容器220的一侧，用于排出内部气体; 以及设置在真空容器200处以将真空容器200加热到预定温度的加热装置。
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公开(公告)号：US07228742B2
公开(公告)日：2007-06-12
申请号：US11418768
申请日：2006-05-05
申请人： Seung Soo Hong , Yong Hyeon Shin , Kwang Hwa Chung
发明人： Seung Soo Hong , Yong Hyeon Shin , Kwang Hwa Chung
IPC分类号： G01L11/00
CPC分类号： G01L21/08
摘要： Disclosed is a pressure measuring system for a vacuum chamber, in particular, a pressure measuring system for a vacuum chamber using ultrasonic wave. In this regard, there is provided a pressure measuring system for a vacuum chamber using ultrasonic wave, comprising a vacuum chamber 10 formed with desired vacuum at the inside thereof; ultrasonic wave-emitting means mounted close to an outer peripheral surface of the vacuum chamber 10 for emitting an ultrasonic wave 62 to the inside of the vacuum chamber 10; ultrasonic wave-receiving means for receiving a reflection wave 64 reflected after the striking of the ultrasonic wave 62 emitted from the ultrasonic wave-emitting means to the vacuum chamber; reflection wave-detecting means for detecting the reflection wave 64 from the ultrasonic wave-receiving means; and amplitude-analyzing means for analyzing the amplitude of the reflection wave 64 detected by the reflection wave-detecting means.
摘要翻译： 公开了一种用于真空室的压力测量系统，特别是使用超声波的真空室的压力测量系统。 在这方面，提供了一种使用超声波的真空室的压力测量系统，包括在其内部形成有所需真空的真空室10; 安装在真空室10的外周面的超声波发射装置，用于向真空室10的内部发射超声波62; 超声波接收装置，用于接收从超声波发射装置发射到超声波发射装置的超声波62的撞击之后反射的反射波64; 用于从超声波接收装置检测反射波64的反射波检测装置; 以及幅度分析装置，用于分析由反射波检测装置检测的反射波64的振幅。
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6.发明授权Apparatus and method for in-situ calibration of vacuum gauge by absolute method and comparison method 失效通过绝对方法和比较方法原位校准真空计的装置和方法公开(公告)号：US07569178B2
公开(公告)日：2009-08-04
申请号：US11418733
申请日：2006-05-05
申请人： Seung Soo Hong , Yong Hyeon Shin , Kwang Hwa Chung , In Tae Lim
发明人： Seung Soo Hong , Yong Hyeon Shin , Kwang Hwa Chung , In Tae Lim
CPC分类号： G01L27/005 , C21D11/00
摘要： An apparatus and method for in-situ calibration of a vacuum gauge by absolute method and comparison method, which can carry out absolute calibration using a static type standard for measuring pressures of vacuum chambers by expanding and moving gas between four vacuum chambers of different volumes in order, and comparison calibration of vacuum gauges in an in-situ state without movement of the vacuum gauges according to a method for controlling gas flow through an orifice using a calibrated standard vacuum gauge. Thus, the absolute calibration and the comparative calibration of the vacuum gauges which have been separately carried out by different apparatuses till now can be carried out by just one apparatus, whereby economical efficiency and convenience in calibration of vacuum gauges are maximized.
摘要翻译： 一种用于通过绝对方法和比较方法原位校准真空计的装置和方法，其可以使用静态标准进行绝对校准，以通过在不同体积的四个真空室之间扩张和移动气体来测量真空室的压力 根据用于通过使用校准的标准真空计来控制通过孔口的气体流量的方法，真空计的原位状态的顺序和比较校准，而不移动真空计。 因此，仅通过一个装置可以进行到目前为止由各种装置分别进行的真空计的绝对校准和比较校准，由此真空计的校准的经济性和便利性最大化。
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公开(公告)号：US20080048663A1
公开(公告)日：2008-02-28
申请号：US11551708
申请日：2006-10-21
申请人： Seung Soo Hong , Kwang Hwa Chung , Yong Hyeon Shin
发明人： Seung Soo Hong , Kwang Hwa Chung , Yong Hyeon Shin
IPC分类号： G01N27/62
CPC分类号： G01L21/34
摘要： Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.
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公开(公告)号：US07061184B2
公开(公告)日：2006-06-13
申请号：US10896156
申请日：2004-07-21
IPC分类号： H01J7/24
CPC分类号： H01J37/32935 , H05H1/0062
摘要： The present invention discloses a device for measuring and monitoring electron density of plasma. The device includes a chamber filled with plasma having varying electron density; a frequency probe having transmission/receiving antennas and a pair of waveguides, one end of which is mounted in the chamber, for radiating and receiving electromagnetic waves; an electromagnetic wave generator electrically connected to one of the waveguides of the frequency probe for generating electromagnetic waves; and a frequency analyzer for scanning the frequency of received electromagnetic waves and analyzing the scanned frequency with respect to the amplitude of the received electromagnetic waves. Coupled to the rear end of the frequency probe is preferably a transfer unit having a hydraulic cylinder structure such that the frequency probe is moved in the chamber to detect the spatial distribution of electron density.
摘要翻译： 本发明公开了一种用于测量和监测等离子体的电子密度的装置。 该装置包括填充有具有变化的电子密度的等离子体的室; 具有发射/接收天线和一对波导的频率探测器，其一端安装在腔室中，用于辐射和接收电磁波; 电磁波发生器电连接到用于产生电磁波的频率探头的一个波导; 以及用于扫描接收到的电磁波的频率并且相对于所接收的电磁波的振幅来分析扫描的频率的频率分析器。 耦合到频率探头的后端优选是具有液压缸结构的传送单元，使得频率探针在腔室中移动以检测电子密度的空间分布。
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9.发明授权Apparatus for measuring pressure by using diaphragm and method of pressure measurement by using diaphragm 有权使用隔膜测量压力的设备和使用隔膜的压力测量方法公开(公告)号：US07784352B2
公开(公告)日：2010-08-31
申请号：US12345054
申请日：2008-12-29
申请人： Seung Soo Hong , Yong Hyeon Shin , Jin Tae Kim
发明人： Seung Soo Hong , Yong Hyeon Shin , Jin Tae Kim
IPC分类号： G01L9/12
CPC分类号： G01L9/0072
摘要： The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.
摘要翻译： 本发明涉及一种使用隔膜的电容型压力测量装置，更具体地说，涉及一种使用能够测量大气压力以下的隔膜以及大气压力以上的隔膜来测量压力的装置， 吸气泵通过将压力可变容器固定地安装在其上安装有隔膜的传感器外壳上。
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10.发明申请Apparatus for Measuring Pressure by Using Diaphragm and Method of Pressure Measurement by Using Diaphragm 有权使用隔膜测量压力的设备和使用隔膜测量压力的方法公开(公告)号：US20090260448A1
公开(公告)日：2009-10-22
申请号：US12345054
申请日：2008-12-29
申请人： Seung Soo Hong , Yong Hyeon Shin , Jin Tae Kim
发明人： Seung Soo Hong , Yong Hyeon Shin , Jin Tae Kim
IPC分类号： G01L9/12
CPC分类号： G01L9/0072
摘要： The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.
摘要翻译： 本发明涉及一种使用隔膜的电容式压力测量装置，更具体地说，涉及一种使用能够测量大气压力以下的隔膜以及大气压力以上的隔膜来测量压力的装置， 吸气泵通过将压力可变容器固定地安装在其上安装有隔膜的传感器外壳上。
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