公开(公告)号：US07785912B2

公开(公告)日：2010-08-31

申请号：US11818716

申请日：2007-06-15

申请人： Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

发明人： Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

IPC分类号： H01L21/00

CPC分类号： B81B3/0021 ,  B81B2201/0292 ,  B81B2203/0118 ,  B81C1/00246 ,  B81C2203/075 ,  C30B1/02 ,  C30B29/00 ,  G01L1/044 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L27/12 ,  H01L29/66757 ,  H04R17/02 ,  H04R31/006

摘要： A piezo-TFT cantilever microelectromechanical system (MEMS) and associated fabrication processes are provided. The method comprises: providing a substrate, such as glass for example; forming thin-films overlying the substrate; forming a thin-film cantilever beam; and simultaneously forming a TFT within the cantilever beam. The TFT is can be formed least partially overlying a cantilever beam top surface, at least partially overlying a cantilever beam bottom surface, or embedded within the cantilever beam. In one example, forming thin-films on the substrate includes: selectively forming a first layer with a first stress level; selectively forming a first active Si region overlying the first layer; and selectively forming a second layer overlying the first layer with a second stress level. The thin-film cantilever beam is formed from the first and second layers, while the TFT source/drain (S/D) and channel regions are formed from the first active Si region.

摘要翻译： 提供了压电TFT悬臂微机电系统（MEMS）及相关制造工艺。 该方法包括：提供例如玻璃等基板; 形成覆盖衬底的薄膜; 形成薄膜悬臂梁; 并且同时在悬臂梁内形成TFT。 TFT可以形成为最少部分地覆盖在悬臂梁顶表面上，至少部分地覆盖悬臂梁底表面或嵌入在悬臂梁内。 在一个示例中，在衬底上形成薄膜包括：选择性地形成具有第一应力水平的第一层; 选择性地形成覆盖在第一层上的第一有源Si区; 以及以第二应力水平选择性地形成覆盖所述第一层的第二层。 薄膜悬臂梁由第一和第二层形成，而TFT源极/漏极（S / D）和沟道区域由第一有源Si区形成。

公开(公告)号：US07253488B2

公开(公告)日：2007-08-07

申请号：US11031320

申请日：2005-01-05

申请人： Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

发明人： Changqing Zhan ,  Michael Barrett Wolfson ,  John W. Hartzell

IPC分类号： H01L27/14

CPC分类号： B81B3/0021 ,  B81B2201/0292 ,  B81B2203/0118 ,  B81C1/00246 ,  B81C2203/075 ,  C30B1/02 ,  C30B29/00 ,  G01L1/044 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/124 ,  G01P2015/0828 ,  H01L27/12 ,  H01L29/66757 ,  H04R17/02 ,  H04R31/006

摘要： A piezo-TFT cantilever microelectromechanical system (MEMS) and associated fabrication processes are provided. The method comprises: providing a substrate, such as glass for example; forming thin-films overlying the substrate; forming a thin-film cantilever beam; and simultaneously forming a TFT within the cantilever beam. The TFT is can be formed least partially overlying a cantilever beam top surface, at least partially overlying a cantilever beam bottom surface, or embedded within the cantilever beam. In one example, forming thin-films on the substrate includes: selectively forming a first layer with a first stress level; selectively forming a first active Si region overlying the first layer; and selectively forming a second layer overlying the first layer with a second stress level. The thin-film cantilever beam is formed from the first and second layers, while the TFT source/drain (S/D) and channel regions are formed from the first active Si region.

摘要翻译： 提供了压电TFT悬臂微机电系统（MEMS）及相关制造工艺。 该方法包括：提供例如玻璃等基板; 形成覆盖衬底的薄膜; 形成薄膜悬臂梁; 并且同时在悬臂梁内形成TFT。 TFT可以形成为最少部分地覆盖在悬臂梁顶表面上，至少部分地覆盖悬臂梁底表面或嵌入在悬臂梁内。 在一个示例中，在衬底上形成薄膜包括：选择性地形成具有第一应力水平的第一层; 选择性地形成覆盖在第一层上的第一有源Si区; 以及以第二应力水平选择性地形成覆盖所述第一层的第二层。 薄膜悬臂梁由第一和第二层形成，而TFT源极/漏极（S / D）和沟道区域由第一有源Si区形成。

公开(公告)号：US07425749B2

公开(公告)日：2008-09-16

申请号：US11516473

申请日：2006-09-06

申请人： John Walter Hartzell ,  Changqing Zhan ,  Michael Barrett Wolfson

发明人： John Walter Hartzell ,  Changqing Zhan ,  Michael Barrett Wolfson

IPC分类号： H01L29/66 ,  G01N27/00

CPC分类号： G01L1/18 ,  B81C1/00246 ,  G01L1/16 ,  H01L27/12 ,  H01L27/20 ,  H04R17/02 ,  H04R19/00 ,  H04R31/00 ,  H04R2499/11

摘要： A MEMS pixel sensor is provided with a thin-film mechanical device having a mechanical body, with a mechanical state responsive to a proximate environment. A thin-film electronic device converts the mechanical state into electrical signals. A pixel interface supplies power to the electronic device and transceives electrical signals. The sensor is able to operate dynamically, in real-time. For example, if the mechanical device undergoes a sequence of mechanical states at a corresponding plurality of times, the electronic device is able to supply a sequence of electrical signals to the pixel interface that are responsive to the sequence of mechanical states, at the plurality of times. Each MEMS pixel sensor may include a number of mechanical devices, and corresponding electronic devices, to provide redundancy or to measure a broadband response range.

摘要翻译： MEMS像素传感器设置有具有机械体的薄膜机械装置，其具有响应于邻近环境的机械状态。 薄膜电子设备将机械状态转换为电信号。 像素接口为电子设备供电并收发电信号。 该传感器能够实时动态地运行。 例如，如果机械装置在相应的多次经历了一系列机械状态，那么电子装置能够在多个时刻向像素接口提供响应于机械状态序列的电信号序列 次 每个MEMS像素传感器可以包括多个机械设备和相应的电子设备，以提供冗余或测量宽带响应范围。

公开(公告)号：US06529654B1

公开(公告)日：2003-03-04

申请号：US09847868

申请日：2001-05-02

申请人： Richard Koonwai Wong ,  Edgar D. Sheh ,  Jenghung Chen ,  Xiao Yang ,  Michael Barrett Wolfson

发明人： Richard Koonwai Wong ,  Edgar D. Sheh ,  Jenghung Chen ,  Xiao Yang ,  Michael Barrett Wolfson

IPC分类号： G02B626

CPC分类号： G02B6/359 ,  G02B6/3518 ,  G02B6/357 ,  G02B2006/12104

摘要： A method for switching signals using one of a plurality of mirrors in an array structure. The method includes determining an optical path to be formed between an input fiber and an output fiber. The method also includes determining a set of mirrors to be used to form the optical path. The set of mirrors includes at least a first mirror. The first mirror is coupled to a mechanical spring assembly and an actuation assembly. The method captures an analog signal indicative of a spatial position of the first mirror using a position sensing device. The sensing device is coupled to the mirror. The method also converts the signal analog signal into a digital signal. The method processes the digital signal indicative of the spatial position of the mirror using the digital signal processing device to obtain a characteristic of the mirror. The method provides a control signal based upon the characteristic of the mirror. The converts the control signal into an analog control signal. The method uses the analog control signal with the actuation assembly to set a desired position of the first mirror.

摘要翻译： 一种使用阵列结构中的多个反射镜之一切换信号的方法。 该方法包括确定要在输入光纤和输出光纤之间形成的光路。 该方法还包括确定要用于形成光路的一组反射镜。 镜组包括至少第一镜。 第一反射镜联接到机械弹簧组件和致动组件。 该方法使用位置感测装置捕获指示第一反射镜的空间位置的模拟信号。 感测装置耦合到反射镜。 该方法还将信号模拟信号转换为数字信号。 该方法使用数字信号处理装置处理指示反射镜的空间位置的数字信号，以获得反射镜的特性。 该方法基于反射镜的特性提供控制信号。 将控制信号转换为模拟控制信号。 该方法使用具有致动组件的模拟控制信号来设置第一反射镜的期望位置。