公开(公告)号：US20240023447A1

公开(公告)日：2024-01-18

申请号：US17963198

申请日：2022-10-11

Applicant: Coretronic MEMS Corporation

Inventor： Hao-Chien Cheng ,  Wei-Leun Fang ,  Kai-Chih Liang ,  Ming-Ching Wu

IPC: H01L41/09

CPC classification number: H01L41/0973 ,  H01L41/096

Abstract: A piezoelectric actuating apparatus including a frame, a rotatable element, an actuating structure, and a sensing structure is provided. The rotatable element is disposed in an accommodating opening and connected to the frame through a rotating shaft structure. The rotatable element is configured to reciprocatingly swing relative to the frame with an axis of the rotating shaft structure. The actuating structure is elastically coupled to the rotatable element through at least one first elastic component. The sensing structure is elastically coupled to the rotatable element through at least one second elastic component. The actuating structure is deformed by receiving a driving signal, and drives the rotatable element to rotate around the axis through the at least one first elastic component. The rotating rotatable element is linked to the sensing structure through the at least one second elastic component to be correspondingly deformed, and outputs a sensing signal.

公开(公告)号：US20240365670A1

公开(公告)日：2024-10-31

申请号：US18641417

申请日：2024-04-21

Applicant: Coretronic MEMS Corporation

Inventor： Hao-Chien Cheng ,  Kai-Chih Liang ,  Ming-Ching Wu

IPC: H10N30/20 ,  B81B3/00 ,  G02B26/08 ,  H10N30/80

CPC classification number: H10N30/206 ,  B81B3/0021 ,  H10N30/802 ,  B81B2203/0163 ,  B81B2203/0346 ,  B81B2203/04 ,  B81B2203/058 ,  G02B26/0858

Abstract: A piezoelectric actuating apparatus includes a frame having an opening, a rotatable element, first and second actuating elements, a sensing element, transmission elements, a sensing electrode, and a driving electrode. The rotatable element is in the opening, connected to the frame via a rotating shaft structure, and reciprocatingly swings relative to the frame around an axis of the rotating shaft structure as a center. The first actuating element is connected to the rotatable element. The transmission elements are between the first and second actuating elements, and between the first actuating element and the sensing element. The second actuating element and the sensing element are coupled to the rotatable element via the transmission elements. The sensing electrode is on a part of the transmission elements and the sensing element. The driving electrode is on another part of the transmission elements and the first and second actuating elements.