ROCKER TYPE POLISHING APPARATUS AND METHOD FOR FULL-APERTURE DETERMINISTIC POLISHING OF A PLANAR PART

    公开(公告)号:US20220305604A1

    公开(公告)日:2022-09-29

    申请号:US17289718

    申请日:2020-04-17

    Abstract: Disclosed is a rocker type polishing apparatus and method for full-aperture deterministic polishing of a planar part. The apparatus includes a control system, a substrate, a lifting plate, a polishing module and a measuring module. The polishing module and the measuring module are arranged on the substrate. The lifting plate is arranged between the polishing module and the measuring module. The polishing module includes a rocker mechanism, a polishing pad surface dressing mechanism, a polishing pad surface profile measuring apparatus and a continuous polishing pad mechanism. Considering the specific surface profile of the planar part, the present invention makes the material removal rate distribution of the planar part and the surface profile of the planar part be in the normalized mirror symmetry relationship by controlling the material removal rate distribution on the surface of the planar part, thereby implementing the deterministic polishing of the planar part and ensuring the efficient convergence of the surface profile of the planar part in the polishing process. The present invention completes the high-precision polishing process by using the low-cost operation manner, thereby reducing the device cost.

    CAM ROTARY ENGINE POWER SYSTEM OF INTERNAL COMBUSTION TYPE

    公开(公告)号:US20200072133A1

    公开(公告)日:2020-03-05

    申请号:US16492892

    申请日:2018-03-12

    Abstract: A cam rotary engine power system of internal combustion type, making use of the cam and a plurality of cam followers to form cam mechanisms, and forming a plurality of circumferential distributed sealing working chambers with the inner-cavity-member, the external-rotating-surface-member and the end-cover-member. The volume of those chambers change with the relative rotation of the cam and the cam followers, in which the intake, compression, power and exhaust processes of the Otto cycle are completed by valve coordination. The chemical energy produced by gas combustion is directly converted into the mechanical energy of the rotor in the form of fixed axis rotation. The power system does not set the crankshaft of piston engine, and the high pressure gas directly drives the rotor to rotate and output power. The structure of this power system is relatively simple and its parameters can be adjusted in a wide range.

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