ROCKER TYPE POLISHING APPARATUS AND METHOD FOR FULL-APERTURE DETERMINISTIC POLISHING OF A PLANAR PART

    公开(公告)号:US20220305604A1

    公开(公告)日:2022-09-29

    申请号:US17289718

    申请日:2020-04-17

    Abstract: Disclosed is a rocker type polishing apparatus and method for full-aperture deterministic polishing of a planar part. The apparatus includes a control system, a substrate, a lifting plate, a polishing module and a measuring module. The polishing module and the measuring module are arranged on the substrate. The lifting plate is arranged between the polishing module and the measuring module. The polishing module includes a rocker mechanism, a polishing pad surface dressing mechanism, a polishing pad surface profile measuring apparatus and a continuous polishing pad mechanism. Considering the specific surface profile of the planar part, the present invention makes the material removal rate distribution of the planar part and the surface profile of the planar part be in the normalized mirror symmetry relationship by controlling the material removal rate distribution on the surface of the planar part, thereby implementing the deterministic polishing of the planar part and ensuring the efficient convergence of the surface profile of the planar part in the polishing process. The present invention completes the high-precision polishing process by using the low-cost operation manner, thereby reducing the device cost.

    LINE-SHAPE SPOT LASER BENDING METHOD FOR METAL SHEETS

    公开(公告)号:US20210162479A1

    公开(公告)日:2021-06-03

    申请号:US17055939

    申请日:2020-06-17

    Abstract: The present invention belongs to the technical field of high-efficiency, high-precision and high-performance laser bending of metal sheets, and relates to a line-shape spot laser bending method for metal sheets. The present invention uses a multimode laser scanning mirror or a single piezoelectric deformable mirror to convert laser Gaussian distributed point spots to uniformly distributed line-shape spot, and meanwhile, loads the spots in a bending line area and bends metal sheets so that the temperature field in the bending line of the metal sheet is distributed uniformly to achieve the purposes of reducing warpage deformation, enhancing bending angle consistency and increasing the bending efficiency.

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