公开(公告)号：US11342153B2

公开(公告)日：2022-05-24

申请号：US17201629

申请日：2021-03-15

Applicant: Electronics and Telecommunications Research Institute

Inventor： Jae-Woo Kim ,  Yoon-Ho Song ,  Eun Sol Ko

IPC: H01J29/62 ,  H01J29/48 ,  H01J29/04 ,  H01J1/30 ,  H01J1/304

Abstract: Provided is a field emission device including a cathode electrode and an anode electrode, which are spaced apart from each other, an emitter disposed on the cathode electrode, a gate electrode disposed between the cathode electrode and the anode electrode and including a gate opening that overlaps the emitter, and a plurality of alignment electrodes disposed between the gate electrode and the cathode electrode. Here, the alignment electrodes surround a side surface of the emitter.