公开(公告)号：US20150047417A1

公开(公告)日：2015-02-19

申请号：US14297984

申请日：2014-06-06

Applicant: Electronics and Telecommunications Research Institute ,  Pusan National University Industry-University Cooperation Foundation

Inventor： Hyung Ju PARK ,  Nak Jin CHOI ,  Moon Youn JUNG ,  Dae Sik LEE ,  Hyuntae KANG ,  Kang Hyun PARK

IPC: C23C30/00 ,  G01N27/30 ,  H01L21/02

CPC classification number: H01L21/02565 ,  G01N27/127 ,  H01L21/02425 ,  H01L21/02601 ,  H01L21/02628 ,  Y10T428/2991 ,  Y10T428/2993

Abstract: The present invention relates to a core-shell nanoparticle, a method of fabricating the same and a gas sensor using the same, more particularly to a core-shell nanoparticle which includes a core including a first metal oxide and a shell including a second metal oxide, the first metal oxide and the second metal oxide being oxides of the same metal having different oxidation states, a method of fabricating the same and a gas sensor using the same.

Abstract translation: 本发明涉及核 - 壳纳米颗粒，其制造方法和使用其的气体传感器，更具体地涉及一种核 - 壳纳米颗粒，其包括包含第一金属氧化物的核和包含第二金属氧化物的壳 第一金属氧化物和第二金属氧化物是具有不同氧化态的相同金属的氧化物，其制造方法和使用其的气体传感器。

公开(公告)号：US20140175570A1

公开(公告)日：2014-06-26

申请号：US13909477

申请日：2013-06-04

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hyung-Kun LEE ,  Seungeon MOON ,  Nak Jin CHOI ,  Jaewoo LEE

IPC: H01L29/66

CPC classification number: G01N27/128 ,  G01N27/123

Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

Abstract translation: 提供双面微气体传感器及其制造方法。 传感器可以包括弹性层，弹性层上的发热电阻层，发热电阻层上的层间绝缘层，层间绝缘层上的上感测层，以及设置在弹性层下方的下感测层 面对发热电阻层，从而减少发热电阻层的热损失。

公开(公告)号：US20140208838A1

公开(公告)日：2014-07-31

申请号：US13897293

申请日：2013-05-17

Applicant: Electronics and Telecommunications Research Institute

Inventor： Seung Eon MOON ,  Jae Woo LEE ,  Hyung-Kun LEE ,  Nak Jin CHOI ,  Woo Seok YANG ,  Jong Dae KIM

IPC: G01M15/10

CPC classification number: G01N27/16

Abstract: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

Abstract translation: 提供了一种使用多孔膜嵌入式微型加热器和微机电系统（MEMS）技术的催化可燃气体传感器。 本公开提供了一种在结构上，机械上和电气上稳定的气体传感器，并且在MEMS催化可燃气体传感器中具有简单的装置制造工艺，其小型化并且还通过在多孔中刺穿多个孔而消耗极少量的功率 膜，加热电阻器和感测电极，通过蚀刻，从而通过多个孔将基板热隔离预定厚度，并且包括使用感测材料形成的感测结构和使用补偿材料形成的补偿结构。