公开(公告)号：US10961617B2

公开(公告)日：2021-03-30

申请号：US14870981

申请日：2015-09-30

Applicant: Entegris, Inc.

Inventor： I-Kuan Lin ,  Nilesh Gunda ,  Dennis Radgowski ,  Chandra Venkatraman

IPC: C23C14/48 ,  C23C14/58 ,  C23C14/08 ,  H01J37/32

Abstract: Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.

公开(公告)号：US20160273095A1

公开(公告)日：2016-09-22

申请号：US14870981

申请日：2015-09-30

Applicant: Entegris, Inc.

Inventor： I-Kuan Lin ,  Nilesh Gunda ,  Dennis Radgowski ,  Chandra Venkatraman

IPC: C23C14/48 ,  C23C14/58

CPC classification number: C23C14/48 ,  C23C14/08 ,  C23C14/083 ,  C23C14/58 ,  C23C14/5806 ,  C23C14/5846 ,  H01J37/32467 ,  H01J37/32495

Abstract: Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.

Abstract translation: 提供了具有优异的等离子体耐蚀刻性并且可以延长RIE部件寿命的涂层的制品和方法。 一种制品具有真空兼容的衬底和覆盖至少一部分衬底的保护膜。 膜包含含有钇的氟化金属氧化物。