专利检索 ap:("FEI Company") AND inv:"Phillip Parker" 第 1 页

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发明授权
Method and system for automatic zone axis alignment 有权

公开(公告)号：US11211222B2

公开(公告)日：2021-12-28

申请号：US16730998

申请日：2019-12-30

申请人： FEI Company

发明人： John J. Flanagan , Nathaniel Kurtz , Ashley Tilson , Phillip Parker

IPC分类号： H01J37/244 , H01J37/28 , G01N23/20058 , H01J37/22

摘要： Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.